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WO2018168927A1 - Module de lumière - Google Patents

Module de lumière Download PDF

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Publication number
WO2018168927A1
WO2018168927A1 PCT/JP2018/009973 JP2018009973W WO2018168927A1 WO 2018168927 A1 WO2018168927 A1 WO 2018168927A1 JP 2018009973 W JP2018009973 W JP 2018009973W WO 2018168927 A1 WO2018168927 A1 WO 2018168927A1
Authority
WO
WIPO (PCT)
Prior art keywords
elastic
support
mirror
opening
pair
Prior art date
Application number
PCT/JP2018/009973
Other languages
English (en)
Japanese (ja)
Inventor
達哉 杉本
恭輔 港谷
智史 鈴木
柴山　勝己
暢郎 細川
直 井上
将師 伊藤
豊 蔵本
Original Assignee
浜松ホトニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017048559A external-priority patent/JP6782651B2/ja
Priority claimed from JP2017051484A external-priority patent/JP6778134B2/ja
Application filed by 浜松ホトニクス株式会社 filed Critical 浜松ホトニクス株式会社
Priority to DE112018001385.5T priority Critical patent/DE112018001385T5/de
Priority to CN201880017324.2A priority patent/CN110392858B/zh
Priority to US16/492,672 priority patent/US11561388B2/en
Publication of WO2018168927A1 publication Critical patent/WO2018168927A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

Definitions

  • One aspect of the present disclosure relates to an optical module.
  • An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, Patent Document 1).
  • Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.
  • Patent Document 2 describes an optical system manufacturing process.
  • a template substrate and an optical bench are prepared.
  • An alignment slot is formed on the template substrate by etching.
  • Bond pads are arranged on the main surface of the optical bench.
  • the template substrate is attached to the main surface of the optical bench so that the alignment slot is disposed on the bond pad.
  • the optical element is inserted into the alignment slot while being positioned using the side wall of the alignment slot, and is positioned on the bond pad. Then, the optical element is bonded to the optical bench by reflowing the bond pad.
  • the optical module as described above has the following problems in that, for example, the size of the movable mirror depends on the achievement level of deep processing on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.
  • An object of one aspect of the present disclosure is to provide an optical module that can reliably mount an optical element regardless of characteristics of a mounting region.
  • An optical module is an optical module including an optical element and a base on which the optical element is mounted, and the optical element is optical so as to form an optical part having an optical surface and an annular region.
  • the elastic part provided around the part and the optical part are provided so as to sandwich the optical part in the first direction along the optical surface, and the elastic force is applied according to the elastic deformation of the elastic part and the mutual distance is variable.
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface, and the support portion is provided with the elastic force of the elastic portion.
  • the optical element is inserted into the opening in the state, and the optical element is supported by the mounting region by the reaction force of the elastic force applied to the support portion from the inner surface of the opening in a state where the optical surface intersects the main surface.
  • the optical element has an elastic part and a pair of support parts whose distances can be changed according to the elastic deformation of the elastic part.
  • an opening communicating with the main surface is formed in the mounting region of the base on which the optical element is mounted. Therefore, as an example, the support portion is inserted into the opening in a state in which the elastic portion is elastically deformed so that the distance between the support portions is reduced, and a part of the elastic deformation of the elastic portion is released, so that the support portion is opened in the opening. The distance between each other increases, and the support portion can be brought into contact with the inner surface of the opening. Thereby, an optical element is supported by the reaction force provided to a support part from the inner surface of opening. As described above, in this optical module, the optical element is mounted on the base using the elastic force. Therefore, the optical element can be reliably mounted without considering the adverse effect of the adhesive, that is, regardless of the characteristics of the mounting area.
  • the elastic portion is provided so as to form an annular region. For this reason, for example, the strength of the elastic portion is improved as compared with a case where the elastic portion is in a cantilever state (in this case, a closed region such as an annular shape is not formed by the elastic portion). Therefore, for example, damage to the elastic portion can be suppressed during manufacturing or handling of the optical element. That is, it is another object of one aspect of the present disclosure to provide an optical element that can suppress breakage of an elastic portion with respect to the optical element.
  • the base includes a support layer and a device layer provided on the support layer and including a main surface and a mounting region, and the opening intersects the main surface.
  • the support layer may include a locking portion that is bent so as to be in contact with a pair of edges of the opening in a direction intersecting the main surface. In this case, the locking portion is locked to the mounting region at a position where the locking portion contacts the pair of edges of the opening. Therefore, the optical element can be reliably mounted on the base, and the optical element can be positioned in the direction intersecting the main surface of the base.
  • the inner surface of the opening includes a pair of inclined surfaces that are inclined so that the distance from each other increases from one end toward the other end when viewed from the direction intersecting the main surface. And a reference surface extending along a reference line connecting the other end of the inclined surface and the other end of the other inclined surface.
  • the optical element may include a first connection unit that connects the optical unit and the elastic unit to each other.
  • the optical part may be connected to the elastic part.
  • the elastic portion may be formed in an annular shape so as to surround the optical portion when viewed from the second direction intersecting the optical surface. In this case, since the end portion does not occur in the elastic portion, the strength of the elastic portion can be reliably improved.
  • the support portion includes the second connecting portion connected to the elastic portion, and the second connecting portion along the third direction along the optical surface and intersecting the first direction. And a leg that extends beyond the optical surface and is inserted into the opening.
  • the optical element can be mounted on the base in a state where the entire optical surface protrudes from the main surface.
  • the optical module according to one aspect of the present disclosure further includes a fixed mirror mounted on the support layer, the device layer, or the intermediate layer, and a beam splitter mounted on the support layer, the device layer, or the intermediate layer.
  • the optical element is a movable mirror including an optical surface that is a mirror surface
  • the device layer has a drive region connected to the mounting region
  • the movable mirror, the fixed mirror, and the beam splitter constitute an interference optical system. It may be arranged as follows. In this case, an FTIR with improved sensitivity can be obtained.
  • the mounting area where the movable mirror is mounted has a characteristic of being connected to the driving area and driven. Therefore, the above configuration is more effective because it is easily affected by the adverse effects of the adhesive.
  • the base includes an intermediate layer provided between the support layer and the device layer, the support layer is the first silicon layer of the SOI substrate, and the device layer is The second silicon layer of the SOI substrate, and the intermediate layer may be an insulating layer of the SOI substrate.
  • the SOI substrate a configuration for reliably mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.
  • An optical module includes a light incident unit arranged to allow measurement light to be incident on the interference optical system from the outside, and a light emission arranged to emit measurement light to the outside from the interference optical system May be provided.
  • a light incident unit arranged to allow measurement light to be incident on the interference optical system from the outside
  • a light emission arranged to emit measurement light to the outside from the interference optical system May be provided.
  • an FTIR including a light incident part and a light emission part can be obtained.
  • an optical module that can reliably mount an optical element regardless of the characteristics of the mounting region.
  • FIG. 2 is a cross-sectional view taken along the line IIA-IIA shown in FIG.
  • FIG. 3 is a cross-sectional view taken along line IIIA-IIIA shown in FIG.
  • A) is a perspective view of the peripheral structure of the movable mirror shown in FIG. 1
  • (b) is a cross-sectional view taken along line IVbA-IVbA shown in (a) of FIG.
  • FIG. 2 is a cross-sectional view taken along the line VA-VA shown in FIG.
  • FIG. 2 is a cross-sectional view taken along the line VIA-VIA shown in FIG. It is sectional drawing of the modification of the surrounding structure of a movable mirror.
  • FIG. 15 is a cross-sectional view taken along line XVA-XVA shown in FIG. 14.
  • FIG. 15 is a cross-sectional view taken along line XVIA-XVIA shown in FIG. 14.
  • FIG. 30 is a cross-sectional view taken along the line IIB-IIB shown in FIG. 29.
  • FIG. 30 is a cross-sectional view taken along line IIIB-IIIB shown in FIG. 29.
  • FIG. 31 is a cross-sectional view taken along the line IVB-IVB shown in FIG. 30.
  • FIG. 30 is a cross-sectional view taken along line VB-VB shown in FIG. 29.
  • FIG. 30 is a cross-sectional view taken along line VIB-VIB shown in FIG. 29. It is a top view which shows the manufacturing process of a movable mirror.
  • FIG. 1 It is a top view which shows the manufacturing process of a movable mirror. It is a top view which shows the mounting process of a movable mirror. It is a side view at the time of seeing from the arrow VAB side shown by FIG. (A)-(c) is a top view which shows the mounting process of a movable mirror.
  • A) And (b) is a top view which shows the mounting process of a movable mirror.
  • A) And (b) is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror.
  • A) And (b) is a front view which shows the modification of a movable mirror.
  • FIG. 47 is a cross-sectional view taken along the line IIC-IIC shown in FIG. 46.
  • FIG. 47 is a cross-sectional view taken along line IIIC-IIIC shown in FIG. 46.
  • FIG. 47 is a partial plan view including a mounting area shown in FIG. 46.
  • FIG. 47 is a cross-sectional view taken along the line VC-VC shown in FIG. 46.
  • FIG. 47 is a cross-sectional view taken along line VIC-VIC shown in FIG. 46.
  • the optical module 1A includes a base BA.
  • the base BA has a main surface BsA.
  • the base BA includes a support layer 2A, a device layer 3A provided on the support layer 2A, and an intermediate layer 4A provided between the support layer 2A and the device layer 3A.
  • the main surface BsA is a surface of the device layer 3A opposite to the support layer 2A.
  • the support layer 2A, the device layer 3A, and the intermediate layer 4A are configured by an SOI substrate.
  • the support layer 2A is the first silicon layer of the SOI substrate.
  • the device layer 3A is a second silicon layer of the SOI substrate.
  • the intermediate layer 4A is an insulating layer of the SOI substrate.
  • the support layer 2A, the device layer 3A, and the intermediate layer 4A have, for example, a rectangular shape with a side of about 10 mm when viewed from the ZA axis direction (a direction parallel to the ZA axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2A and the device layer 3A is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4A is, for example, about several ⁇ m.
  • the device layer 3A and the intermediate layer 4A are shown with one corner of the device layer 3A and one corner of the intermediate layer 4A cut out.
  • the device layer 3A has a mounting area 31A and a driving area 32A connected to the mounting area 31A.
  • the drive region 32A includes a pair of actuator regions 33A and a pair of elastic support regions 34A.
  • the mounting region 31A and the drive region 32A are integrally formed on a part of the device layer 3A by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33A are arranged on both sides of the mounting region 31A in the XA axis direction (the direction parallel to the XA axis orthogonal to the ZA axis). That is, the mounting area 31A is sandwiched between the pair of actuator areas 33A in the XA axis direction.
  • Each actuator region 33A is fixed to the support layer 2A via the intermediate layer 4A.
  • a first comb tooth portion 33aA is provided on a side surface of each actuator region 33A on the mounting region 31A side.
  • Each first comb tooth portion 33aA is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the first comb tooth portion 33aA.
  • Each actuator region 33A is provided with a first electrode 35A.
  • the pair of elastic support regions 34A are disposed on both sides of the mounting region 31A in the YA axis direction (a direction parallel to the YA axis orthogonal to the ZA axis and the XA axis). That is, the mounting region 31A is sandwiched between the pair of elastic support regions 34A in the YA axis direction. Both end portions 34aA of each elastic support region 34A are fixed to the support layer 2A via the intermediate layer 4A.
  • Each elastic support region 34A has an elastic deformation portion 34bA (a portion between both end portions 34aA) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34A is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the elastic deformation portion 34bA.
  • a second electrode 36A is provided at each of both end portions 34aA.
  • each elastic support area 34A is connected to the mounting area 31A.
  • the mounting region 31A is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below the mounting region 31A. That is, the mounting area 31A is supported by the pair of elastic support areas 34A.
  • a second comb tooth portion 31aA is provided on a side surface of each mounting region 31A on the side of each actuator region 33A.
  • Each second comb tooth portion 31aA is in a state of floating with respect to the support layer 2A by removing the intermediate layer 4A immediately below it.
  • the comb teeth of the first comb tooth portion 33aA are located between the comb teeth of the second comb tooth portion 31aA.
  • the pair of elastic support regions 34A sandwich the mounting region 31A from both sides with respect to the direction AA parallel to the XA axis so that when the mounting region 31A moves along the direction AA, the mounting region 31A returns to the initial position.
  • An elastic force is applied to the mounting region 31A. Accordingly, when a voltage is applied between the first electrode 35A and the second electrode 36A and an electrostatic attractive force acts between the first comb tooth portion 33aA and the second comb tooth portion 31aA facing each other, the electrostatic attractive force
  • the mounting region 31A is moved along the direction AA to a position where the elastic force of the pair of elastic support regions 34A is balanced.
  • the drive region 32A functions as an electrostatic actuator.
  • the optical module 1A further includes a movable mirror 5A, a fixed mirror 6A, a beam splitter 7A, a light incident part 8A, and a light emitting part 9A.
  • the movable mirror 5A, the fixed mirror 6A, and the beam splitter 7A are arranged on the device layer 3A so as to constitute an interference optical system 10A that is a Michelson interference optical system.
  • the movable mirror 5A is mounted on the mounting region 31A of the device layer 3A on one side of the beam splitter 7A in the XA axis direction.
  • the mirror surface 51aA of the mirror portion 51A included in the movable mirror 5A is located on the opposite side of the support layer 2A with respect to the device layer 3A.
  • the mirror surface 51aA is, for example, a surface perpendicular to the XA axis direction (that is, a surface perpendicular to the direction AA) and faces the beam splitter 7A side.
  • the fixed mirror 6A is mounted on the mounting region 37A of the device layer 3A on one side of the beam splitter 7A in the YA axis direction.
  • the mirror surface 61aA of the mirror portion 61A of the fixed mirror 6A is located on the opposite side of the support layer 2A with respect to the device layer 3A.
  • the mirror surface 61aA is, for example, a surface perpendicular to the YA axis direction and faces the beam splitter 7A side.
  • the light incident portion 8A is mounted on the device layer 3A on the other side of the beam splitter 7A in the YA axis direction.
  • the light incident part 8A is configured by, for example, an optical fiber and a collimating lens.
  • the light incident part 8A is arranged so that measurement light is incident on the interference optical system 10A from the outside.
  • the light emitting portion 9A is mounted on the device layer 3A on the other side of the beam splitter 7A in the XA axis direction.
  • the light emitting unit 9A is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting portion 9A is arranged to emit measurement light (interference light) from the interference optical system 10A to the outside.
  • the beam splitter 7A is a cube type beam splitter having an optical functional surface 7aA.
  • the optical functional surface 7aA is located on the side opposite to the support layer 2A with respect to the device layer 3A.
  • the beam splitter 7A is positioned by bringing one corner on the bottom side of the beam splitter 7A into contact with one corner of the rectangular opening 3aA formed in the device layer 3A.
  • the beam splitter 7A is mounted on the support layer 2A by being fixed to the support layer 2A by adhesion or the like in a positioned state.
  • the optical module 1A configured as described above, when the measurement light L0A is incident on the interference optical system 10A from the outside via the light incident portion 8A, a part of the measurement light L0A is transmitted to the optical functional surface 7aA of the beam splitter 7A.
  • the reflected light travels toward the movable mirror 5A, and the remaining portion of the measurement light L0A passes through the optical function surface 7aA of the beam splitter 7A and travels toward the fixed mirror 6A.
  • a part of the measurement light L0A is reflected by the mirror surface 51aA of the movable mirror 5A, travels on the same optical path toward the beam splitter 7A, and passes through the optical functional surface 7aA of the beam splitter 7A.
  • the remaining part of the measurement light L0A is reflected by the mirror surface 61aA of the fixed mirror 6A, travels on the same optical path toward the beam splitter 7A, and is reflected by the optical function surface 7aA of the beam splitter 7A.
  • a part of the measurement light L0A transmitted through the optical functional surface 7aA of the beam splitter 7A and the remaining part of the measurement light L0A reflected by the optical functional surface 7aA of the beam splitter 7A become the measurement light L1A that is interference light, and the measurement light L1A is emitted to the outside from the interference optical system 10A via the light emitting portion 9A.
  • the movable mirror 5A can be reciprocated at high speed along the direction AA, so that a small and highly accurate FTIR can be provided.
  • the movable mirror (optical element) 5A includes a mirror part (optical part) 51A having a mirror surface (optical surface) 51aA, an annular elastic part 52A, and a mirror. 53A of connection part (1st connection part) which mutually connects 51A and elastic part 52A, a pair of support part 56A, and a pair of connection part (2nd connection part) which mutually connect 56 A of support parts, and elastic part 52A ) 57A.
  • the mirror part 51A is formed in a disc shape.
  • the mirror surface 51aA is a circular plate surface of the mirror portion 51A.
  • the movable mirror 5A is mounted on the base BA in a state where the mirror surface 51aA intersects (for example, is orthogonal to) the main surface BsA.
  • the elastic part 52A is formed in an annular shape so as to surround the mirror part 51A while being separated from the mirror part 51A when viewed from the direction intersecting the mirror surface 51aA (second direction, XA axis direction).
  • the elastic portion 52A is provided around the mirror portion 51A and forms an annular region CAA.
  • the connecting portion 53A connects the mirror portion 51A and the elastic portion 52A to each other at the center of the mirror portion 51A in the direction intersecting the main surface BsA (third direction, ZA axis direction).
  • a single connecting portion 53A is provided.
  • the elastic portion 52A is formed in an annular plate shape by a semicircular leaf spring 52aA and a semicircular leaf spring 52bA continuous to the leaf spring 52aA.
  • the leaf spring 52aA is a portion disposed on the main surface BsA side (a leg portion 54A side described later) with respect to the center line CLA passing through the center of the mirror portion 51A in the ZA axis direction.
  • the center line CLA is an imaginary straight line extending along a direction (first direction, YA axis direction) along the mirror surface 51aA and the main surface BsA.
  • the leaf spring 52bA is a portion disposed on the opposite side of the main surface BsA from the center line CLA (on the opposite side to a leg portion 54A described later).
  • the spring constant of the leaf spring 52aA and the spring constant of the leaf spring 52bA are equal to each other. That is, the elastic part 52A has a symmetrical shape with respect to the center line CLA, and the spring constant of the elastic part 52A is equal to each other on both sides of the center line CLA.
  • the support portion 56A has a bar shape with a rectangular cross section, and is provided so as to sandwich the mirror portion 51A and the elastic portion 52A in the YA axis direction.
  • the support portion 56A is coupled to the elastic portion 52A by a coupling portion 57A at a position corresponding to the coupling portion 53A along the YA axis direction. Therefore, for example, at the position corresponding to the connecting portion 57A, by applying force to the support portion 56A so as to sandwich the support portion 56A from both sides in the YA axis direction, the elastic portion 52A is elastically deformed so as to be compressed in the YA axis direction. be able to.
  • the mutual distance between the support portions 56A along the YA axis direction is variable according to the elastic deformation of the elastic portion 52A. Further, the elastic force of the elastic portion 52A can be applied to the support portion 56A.
  • the pair of connecting portions 57A and the connecting portion 53A are arranged in a line on the center line CLA.
  • the support portion 56A includes a leg portion 54A. As a whole, the leg portion 54A extends from the connecting portion 57A over the mirror surface 51aA to one side (here, the main surface BsA side) of the mirror surface 51aA along the ZA axis direction.
  • the leg portion 54A includes a locking portion 55A.
  • the locking portion 55A is a portion on the distal end side of the leg portion 54A.
  • the locking portion 55A is bent in a V shape as a whole.
  • the locking portion 55A includes an inclined surface 55aA and an inclined surface 55bA.
  • the inclined surface 55aA and the inclined surface 55bA are opposite surfaces (outer surfaces) of the surfaces of the pair of locking portions 55A that face each other.
  • the inclined surfaces 55aA are inclined so as to approach each other in the direction away from the connecting portion 57A (the ZA axis negative direction) between the pair of locking portions 55A.
  • the inclined surfaces 55bA are inclined so as to be separated from each other in the negative direction of the ZA axis.
  • the absolute value of the inclination angle ⁇ A of the inclined surface 55aA with respect to the ZA axis is less than 90 °.
  • the absolute value of the inclination angle ⁇ A of the inclined surface 55bA is less than 90 °.
  • the absolute value of the inclination angle ⁇ A and the absolute value of the inclination angle ⁇ A are equal to each other.
  • an opening 31bA is formed in the mounting region 31A.
  • the opening 31bA extends in the ZA axis direction and penetrates the device layer 3A. Accordingly, the opening 31bA communicates with (is led to) the main surface BsA and the surface of the device layer 3A opposite to the main surface BsA.
  • the opening 31bA has a columnar shape with a trapezoidal shape when viewed from the ZA axis direction (see FIG. 4). Details of the opening 31bA will be described later.
  • the support portion 56A is inserted into the opening 31bA in a state where the elastic force of the elastic portion 52A is applied.
  • the support portion 56A that is, the movable mirror 5A
  • a part of the locking portion 55A in the support portion 56A is located in the opening 31bA.
  • the locking portion 55A is in contact with a pair of edges (the edge on the main surface BsA side and the edge on the opposite side of the main surface BsA) of the opening 31bA in the ZA axial direction.
  • the inclined surface 55aA is in contact with the edge of the opening 31bA on the main surface BsA side, and the inclined surface 55bA is in contact with the edge of the opening 31bA on the opposite side of the main surface BsA. Accordingly, the locking portion 55A is locked to the mounting area 31A so as to sandwich the mounting area 31A in the ZA axis direction. As a result, the movable mirror 5A is prevented from coming off the base BA in the ZA axis direction.
  • an opening 41A is formed in the intermediate layer 4A.
  • the openings 41A are opened on both sides of the intermediate layer 4A in the ZA axis direction.
  • An opening 21A is formed in the support layer 2A.
  • the openings 21A are opened on both sides of the support layer 2A in the ZA axial direction.
  • a continuous space S1A is constituted by a region in the opening 41A of the intermediate layer 4A and a region in the opening 21A of the support layer 2A. That is, the space S1A includes a region in the opening 41A of the intermediate layer 4A and a region in the opening 21A of the support layer 2A.
  • the space S1A is formed between the support layer 2A and the device layer 3A, and corresponds to at least the mounting region 31A and the drive region 32A.
  • the region in the opening 41A of the intermediate layer 4A and the region in the opening 21A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the opening 41A of the intermediate layer 4A is a portion that should be separated from the support layer 2A in the mounting region 31A and the drive region 32A (that is, a portion that should be in a floating state with respect to the support layer 2A.
  • a gap for separating the entire mounting region 31A, the elastic deformation portion 34bA, the first comb tooth portion 33aA, and the second comb tooth portion 31aA) of each elastic support region 34A from the support layer 2A is formed.
  • each locking portion 55A of the movable mirror 5A is located in the space S1A. Specifically, a part of each locking portion 55A is located in a region in the opening 21A of the support layer 2A via a region in the opening 41A of the intermediate layer 4A. A part of each locking portion 55A protrudes from the surface on the intermediate layer 4A side in the device layer 3A into the space S1A, for example, by about 100 ⁇ m. As described above, the region in the opening 41A of the intermediate layer 4A and the region in the opening 21A of the support layer 2A include the range in which the mounting region 31A moves when viewed from the ZA axis direction. Is reciprocated along the direction AA, a part of each locking portion 55A of the movable mirror 5A located in the space S1A does not come into contact with the intermediate layer 4A and the support layer 2A.
  • the inner surface of the opening 31bA includes a pair of inclined surfaces SLA and a reference surface SRA.
  • the inclined surface SLA includes one end SLaA and the other end SLbA.
  • One end SLaA and the other end SLbA are both ends of the inclined surface SLA when viewed from the ZA axis direction.
  • the pair of inclined surfaces SLA are inclined (for example, with respect to the XA axis) such that the distance from one end SLaA toward the other end SLbA increases.
  • the reference surface SRA extends along a reference line BLA that connects the other end SLbA of one inclined surface SLA and the other end SLbA of the other inclined surface SLA when viewed from the ZA axis direction.
  • the reference surface SRA simply connects the other ends SLbA to each other.
  • the shape of the opening 31bA when viewed from the ZA axis direction is a trapezoid. Accordingly, here, the inclined surface SLA corresponds to a trapezoidal leg, and the reference surface SRA corresponds to a lower base of the trapezoid.
  • the opening 31bA is a single space.
  • the minimum value of the dimension of the opening 31bA in the YA axis direction (that is, the interval between the one ends SLaA of the inclined surface SLA) is a pair of latches when the elastic portion 52A is elastically deformed to be compressed along the YA axis direction.
  • the value is such that the portion 55A can be disposed in the opening 31bA in a lump.
  • the maximum value of the dimension of the opening 31bA in the YA-axis direction (that is, the interval between the other ends SLbA of the inclined surface SLA) is the elasticity of the elastic part 52A when the pair of locking parts 55A is disposed in the opening 31bA. Only a part of the deformation can be released (that is, the elastic portion 52A does not reach the natural length).
  • the locking portion 55A presses the inner surface of the opening 31bA by the elastic force of the elastic portion 52A, and the reaction force from the inner surface of the opening 31bA is generated by the locking portion 55A ( The support portion 56A) is applied. Accordingly, the movable mirror 5A is supported by the mounting region 31A by the reaction force of the elastic force applied to the support portion 56A from the inner surface of the opening 31bA in a state where the mirror surface 51aA intersects (for example, orthogonally) the main surface BsA. .
  • the locking portion 55A is brought into contact with the inclined surface SLA of the opening 31bA. For this reason, the locking portion 55A slides on the inclined surface SLA toward the reference surface SRA by a component in the XA axis direction of the reaction force from the inclined surface SLA, and pushes against the reference surface SRA while contacting the inclined surface SLA. Hit. As a result, the locking portion 55A is inscribed in a corner defined by the inclined surface SLA and the reference surface SRA, and is positioned in both the XA axis direction and the YA axis direction (self-aligned by elastic force).
  • the cross-sectional shape of the locking portion 55A is a quadrangle, when viewed from the ZA axis direction, the inclined surface SLA contacts the locking portion 55A at a point, and the reference surface SRA is fixed to the locking portion 55A. Touch with a line. That is, here, the inner surface of the opening 31bA contacts the pair of locking portions 55A at two points and two lines as seen from the ZA axis direction.
  • the locking portion 55A is locked at the position, and the movable mirror 5A is positioned in the ZA axis direction (self-aligned by the elastic force). That is, in the movable mirror 5A, self-alignment is three-dimensionally performed using the elastic force of the elastic portion 52A.
  • the movable mirror 5A as described above is integrally formed by, for example, MEMS technology (patterning and etching). Accordingly, the thickness of the movable mirror 5A (the dimension in the direction intersecting the mirror surface 51aA) is constant in each part, and is, for example, about 320 ⁇ m.
  • the diameter of the mirror surface 51aA is, for example, about 1 mm.
  • the distance between the surface (inner surface) of the elastic part 52A on the mirror part 51A side and the surface (outer surface) of the mirror part 51A on the elastic part 52A side is, for example, about 200 ⁇ m.
  • the thickness of the elastic portion 52A is, for example, about 10 ⁇ m to 20 ⁇ m.
  • the fixed mirror 6A and its peripheral structure are the same as the movable mirror 5A and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 5 and 6, the fixed mirror (optical element) 6A includes a mirror part (optical part) 61A having a mirror surface (optical surface) 61aA, an annular elastic part 62A, and a mirror part 61A. And the elastic portion 62A, a connecting portion (first connecting portion) 63A, a pair of supporting portions 66A, and a pair of connecting portions (second connecting portions) 67A that connect the supporting portions 66A and the elastic portion 62A to each other. And have.
  • the mirror part 61A is formed in a disc shape.
  • the mirror surface 61aA is a circular plate surface of the mirror part 61A.
  • the fixed mirror 6A is mounted on the base BA in a state where the mirror surface 61aA intersects (for example, is orthogonal to) the main surface BsA of the base BA.
  • the elastic portion 62A is formed in an annular shape so as to surround the mirror portion 61A while being separated from the mirror portion 61A when viewed from the direction intersecting the mirror surface 61aA (second direction, YA axis direction). Therefore, the elastic part 62A is provided around the mirror part 61A and forms an annular region CAA.
  • the connecting portion 63A connects the mirror portion 61A and the elastic portion 62A to each other at the center of the mirror portion 61A in the direction intersecting the main surface BsA (third direction, ZA axis direction).
  • a single connecting portion 63A is provided.
  • the elastic portion 62A is formed in an annular plate shape by a semicircular leaf spring 62aA and a semicircular leaf spring 62bA continuous to the leaf spring 62aA.
  • the leaf spring 62aA is a portion disposed on the main surface BsA side (a leg portion 64A side described later) with respect to the center line CLA passing through the center of the mirror portion 61A in the ZA axis direction.
  • the center line CLA is an imaginary straight line extending along a direction (first direction, XA axis direction) along the mirror surface 61aA and the main surface BsA.
  • the leaf spring 62bA is a portion disposed on the opposite side of the main surface BsA from the center line CLA (on the opposite side to the leg portion 64A described later).
  • the spring constant of the leaf spring 62aA and the spring constant of the leaf spring 62bA are equal to each other. That is, the elastic part 62A has a symmetrical shape with respect to the center line CLA, and the spring constant of the elastic part 62A is equal to each other on both sides of the center line CLA.
  • the support portion 66A is a rod having a rectangular cross section, and is provided so as to sandwich the mirror portion 61A and the elastic portion 62A in the XA axis direction.
  • the support portion 66A is coupled to the elastic portion 62A by a coupling portion 67A at a position corresponding to the coupling portion 63A along the YA axis direction. Therefore, for example, at the position corresponding to the connecting portion 67A, by applying force to the support portion 66A so as to sandwich the support portion 66A from both sides in the XA axis direction, the elastic portion 62A is elastically deformed so as to be compressed in the XA axis direction. be able to.
  • the distance between the support portions 66A along the XA axis direction is variable according to the elastic deformation of the elastic portion 62A. Further, the elastic force of the elastic portion 62A can be applied to the support portion 66A.
  • the pair of connecting portions 67A and the connecting portion 63A are arranged in a line on the center line CLA.
  • the support portion 66A includes a leg portion 64A.
  • the leg portion 64A as a whole extends from the connecting portion 67A to the one side (here, the main surface BsA side) of the mirror surface 61aA across the mirror surface 61aA along the ZA axis direction.
  • the leg portion 64A includes a locking portion 65A.
  • the locking portion 65A is a tip side portion of the leg portion 64A.
  • the locking portion 65A is bent as a whole.
  • the locking portion 65A includes an inclined surface 65aA and an inclined surface 65bA.
  • the inclined surface 65aA and the inclined surface 65bA are surfaces opposite to the surfaces facing each other in the pair of locking portions 65A (outer surfaces).
  • the inclined surfaces 65aA are inclined so as to approach each other in the direction away from the connecting portion 67A (the ZA axis negative direction) between the pair of locking portions 65A.
  • the inclined surfaces 65bA are inclined so as to be separated from each other in the ZA axis negative direction.
  • the inclination angles of the inclined surfaces 65aA and 65bA with respect to the ZA axis are the same as those of the inclined surfaces 55aA and 55bA in the movable mirror 5A.
  • an opening 37aA is formed in the mounting region 37A.
  • the opening 37aA penetrates the device layer 3A in the ZA axis direction. Accordingly, the opening 37aA communicates with (is led to) the main surface BsA and the surface of the device layer 3A opposite to the main surface BsA.
  • the opening 37aA like the opening 31bA in the mounting region 31A, has a columnar shape with a trapezoidal shape when viewed from the ZA axis direction.
  • the support portion 66A is inserted into the opening 37aA in a state where the elastic force of the elastic portion 62A is applied.
  • the support portion 66A (that is, the fixed mirror 6A) penetrates the mounting region 37A through the opening 37aA.
  • a part of the locking portion 65A of the support portion 66A is located in the opening 37aA.
  • the locking portion 65A is in contact with a pair of edges (the edge on the main surface BsA side and the edge on the opposite side of the main surface BsA) of the opening 37aA in the ZA axial direction.
  • the inclined surface 65aA is in contact with the edge of the opening 37aA on the main surface BsA side, and the inclined surface 65bA is in contact with the edge of the opening 37aA on the opposite side of the main surface BsA. Accordingly, the locking portion 65A is locked to the mounting region 37A so as to sandwich the mounting region 37A in the ZA axis direction. As a result, the fixed mirror 6A is prevented from coming off the base BA in the ZA axis direction.
  • an opening 42A is formed in the intermediate layer 4A.
  • the opening 42A includes the opening 37aA of the mounting region 37A when viewed from the ZA axis direction, and opens on both sides of the intermediate layer 4A in the ZA axis direction.
  • An opening 22A is formed in the support layer 2A.
  • the opening 22A includes the opening 37aA of the mounting region 37A when viewed from the ZA axis direction, and is open on both sides of the support layer 2A in the ZA axis direction.
  • a continuous space S2A is constituted by the region in the opening 42A of the intermediate layer 4A and the region in the opening 22A of the support layer 2A. That is, the space S2A includes a region in the opening 42A of the intermediate layer 4A and a region in the opening 22A of the support layer 2A.
  • each locking portion 65A of the fixed mirror 6A is located in the space S2A. Specifically, a part of each locking portion 65A is located in a region in the opening 22A of the support layer 2A via a region in the opening 42A of the intermediate layer 4A. A part of each locking portion 65A protrudes from the surface of the device layer 3A on the intermediate layer 4A side into the space S2A, for example, by about 100 ⁇ m.
  • the inner surface of the opening 37aA is configured similarly to the inner surface of the opening 31bA in the mounting region 31A. Therefore, when the pair of locking portions 65A is disposed in the opening 37aA, the locking portion 65A presses the inner surface of the opening 37aA by the elastic force of the elastic portion 62A, and the reaction force from the inner surface of the opening 37aA is increased by the locking portion 65A ( It will be applied to the support 66A). Accordingly, the fixed mirror 6A is supported by the base BA by the reaction force of the elastic force applied to the support portion 66A from the inner surface of the opening 37aA in a state where the mirror surface 61aA intersects (for example, orthogonally) the main surface BsA. In particular, also in the fixed mirror 6A, as in the case of the movable mirror 5A, three-dimensional self-alignment using the inner surface of the opening 37aA and the elastic force is performed.
  • the fixed mirror 6A as described above is also integrally formed by, for example, the MEMS technique (patterning and etching) similarly to the movable mirror 5A.
  • the dimensions of each part of the fixed mirror 6A are the same as the above-described dimensions of each part of the movable mirror 5A, for example.
  • the movable mirror 5A includes an elastic portion 52A and a pair of support portions 56A whose distances can be changed according to the elastic deformation of the elastic portion 52A.
  • an opening 31bA communicating with the main surface BsA is formed in the mounting area 31A of the base BA on which the movable mirror 5A is mounted.
  • the support portion 56A by inserting the support portion 56A into the opening 31bA in a state where the elastic portion 52A is elastically deformed so that the distance between the support portions 56A is reduced, and releasing a part of the elastic deformation of the elastic portion 52A, The distance between the support portions 56A in the opening 31bA increases, and the support portion 56A can be brought into contact with the inner surface of the opening 31bA.
  • the movable mirror 5A is supported by the reaction force applied to the support portion 56A from the inner surface of the opening 31bA.
  • the movable mirror 5A is mounted on the base BA using the elastic force. Therefore, the optical element can be reliably mounted without considering the adverse effect of the adhesive, that is, regardless of the characteristics of the mounting region 31A.
  • the operation and effect are described by taking the movable mirror 5A as an example, but the same operation and effect are also achieved with respect to the fixed mirror 6A.
  • the elastic portion 52A is provided so as to form the annular area CAA. For this reason, for example, the strength of the elastic portion 52A is improved as compared with a case where the elastic portion 52A is in a cantilever state (in this case, a closed region such as an annular shape is not formed by the elastic portion 52A). Therefore, for example, breakage of the elastic portion 52A can be suppressed when the movable mirror 5A is manufactured or handled.
  • the base BA has a support layer 2A and a device layer 3A provided on the support layer 2A and including the main surface BsA and the mounting region 31A. Further, the opening 31bA passes through the device layer 3A in a direction intersecting the main surface BsA (ZA axis direction).
  • the support portion 56A includes a locking portion 55A that is bent so as to come into contact with a pair of edges of the opening 31bA in the ZA axial direction. Therefore, the locking portion 55A is locked to the mounting region 31A at a position where the locking portion 55A contacts the pair of edges of the opening 31bA. Therefore, the movable mirror 5A can be reliably mounted on the base BA, and the movable mirror 5A can be positioned in the direction intersecting the main surface BsA of the base BA.
  • the inner surface of the opening 31bA has a pair of inclined surfaces SLA inclined so that the distance from one end SLaA to the other end SLbA increases as viewed from the ZA axis direction, and one inclined surface.
  • a reference surface SRA extending along a reference line BLA connecting the other end SLbA of the SLA and the other end SLbA of the other inclined surface SLA. Therefore, when the support portion 56A is inserted into the opening 31bA and a part of the elastic deformation of the elastic portion 52A is released, the support portion 56A is slid on the inclined surface SLA by the elastic force and abuts against the reference surface SRA. Can do. Therefore, the movable mirror 5A can be positioned in the direction along the main surface BsA.
  • the elastic portion 52A is formed in an annular shape so as to surround the mirror portion 51A when viewed from the XA axis direction, thereby forming an annular region CAA. For this reason, since an edge part does not arise in 52 A of elastic parts, the intensity
  • the support portion 56A extends from the connecting portion 57A connected to the elastic portion 52A and the mirror surface 51aA along the ZA axis direction beyond the mirror surface 51aA, and is inserted into the opening 31bA.
  • Leg portion 54A the movable mirror 5A can be mounted on the base BA in a state where the entire mirror surface 51aA protrudes on the main surface BsA of the base BA.
  • the elastic part 52A has a symmetrical shape with respect to the center line CLA of the mirror surface 51aA, and the spring constant of the elastic part 52A is equal to each other on both sides of the center line CLA. For this reason, for example, when the elastic portion 52A is elastically deformed along the YA axis direction, the posture of the movable mirror 5A is less likely to be unstable (for example, twist is not easily generated). Further, when a part of the elastic deformation of the elastic portion 52A is released, the reaction force is suppressed from being input non-uniformly to the pair of support portions 56A from the inner surface of the opening 31bA.
  • the movable mirror 5A passes through the mounting region 31A of the device layer 3A, and a part of each locking portion 55A of the movable mirror 5A is formed between the support layer 2A and the device layer 3A. Is located in the space S1A.
  • the size and the like of each locking portion 55A is not limited, so that the movable mirror 5A can be stably and firmly fixed to the mounting region 31A of the device layer 3A. Therefore, according to the optical module 1A, reliable mounting of the movable mirror 5A to the device layer 3A is realized.
  • each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the opening 41A of the intermediate layer 4A.
  • the support layer 2A is the first silicon layer of the SOI substrate
  • the device layer 3A is the second silicon layer of the SOI substrate
  • the intermediate layer 4A is the insulating layer of the SOI substrate.
  • the mirror surface 51aA of the movable mirror 5A is located on the opposite side of the support layer 2A with respect to the device layer 3A. Thereby, the configuration of the optical module 1A can be simplified.
  • the movable mirror 5A, the fixed mirror 6A, and the beam splitter 7A are arranged so as to constitute the interference optical system 10A. Thereby, FTIR with improved sensitivity can be obtained.
  • the light incident part 8A is arranged so that the measurement light is incident on the interference optical system 10A from the outside, and the light emitting part 9A emits the measurement light from the interference optical system 10A to the outside.
  • FTIR provided with 8 A of light-incidence parts and 9 A of light-projection parts can be obtained.
  • one aspect of the present disclosure is not limited to the above embodiment.
  • the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be employed.
  • space S1A is formed between the support layer 2A and the device layer 3A, and as long as it corresponds to at least the mounting region 31A and the drive region 32A, as shown in FIG. 7 and FIG. Aspects can be employed.
  • a recess 23A that opens to the device layer 3A side is formed in the support layer 2A instead of the opening 21A, and the region in the opening 41A of the intermediate layer 4A and the recess 23A in the support layer 2A
  • a space S1A is configured by the regions.
  • the region in the recess 23A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A through a region in the opening 41A of the intermediate layer 4A. Also with this configuration, a configuration for reliably mounting the movable mirror 5A on the device layer 3A can be suitably realized.
  • the region in the opening 21A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • the region in the recess 23A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • the region in the opening 41A of the intermediate layer 4A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and is separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the power portion from the support layer 2A is formed.
  • the mounting region 31A reciprocates along the direction AA, a part of each locking portion 55A of the movable mirror 5A located in the space S1A comes into contact with the intermediate layer 4A and the support layer 2A. There is no.
  • the support layer 2A and the device layer 3A may be joined to each other without interposing the intermediate layer 4A.
  • the support layer 2A is formed of, for example, silicon, borosilicate glass, quartz glass, or ceramic
  • the device layer 3A is formed of, for example, silicon.
  • the support layer 2A and the device layer 3A are bonded to each other by, for example, room temperature bonding by surface activation, low temperature plasma bonding, direct bonding by high temperature treatment, insulating resin bonding, metal bonding, or glass frit bonding.
  • the space S1A is formed between the support layer 2A and the device layer 3A, and if it corresponds to at least the mounting region 31A and the drive region 32A, FIG. 9, FIG. 10, FIG. As shown in FIG. 12, various aspects can be employed. In any of the configurations, a configuration for surely mounting the movable mirror 5A on the device layer 3A can be suitably realized.
  • a space S1A is formed by the region in the opening 21A of the support layer 2A.
  • the region in the opening 21A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region within the opening 21A of the support layer 2A.
  • the space S1A is configured by the region in the recess 23A of the support layer 2A.
  • the region in the recess 23A of the support layer 2A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A.
  • a recess (first recess) 38A that opens to the support layer 2A side is formed in the device layer 3A, and the region in the recess 38A of the device layer 3A and the support layer 2A A space S1A is configured by the region in the opening 21A.
  • the region in the recess 38A of the device layer 3A and the region in the opening 21A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the recess 38A of the device layer 3A forms a gap for separating the portion to be separated from the support layer 2A in the mounting region 31A and the drive region 32A from the support layer 2A.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space is defined by the region in the recess 38A of the device layer 3A and the region in the recess (second recess) 23A of the support layer 2A.
  • S1A is configured.
  • the region in the recess 38A of the device layer 3A and the region in the recess 23A of the support layer 2A include a range in which the mounting region 31A moves when viewed from the ZA axis direction.
  • the region in the recess 38A of the device layer 3A forms a gap for separating the portion to be separated from the support layer 2A in the mounting region 31A and the drive region 32A from the support layer 2A.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space S1A is configured by the region in the recess 38A of the device layer 3A and the region in the opening 21A of the support layer 2A.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • the region in the opening 21A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the opening 21A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • the recess 38A is formed in the device layer 3A, and the space is defined by the region in the recess 38A of the device layer 3A and the region in the recess (second recess) 23A of the support layer 2A.
  • S1A is configured.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • the region in the recess 23A of the support layer 2A includes a range in which each locking portion 55A of the movable mirror 5A moves when viewed from the ZA axis direction.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 23A of the support layer 2A via a region in the recess 38A of the device layer 3A.
  • a recess 38A is formed in the device layer 3A, and a space S1A is formed by a region in the recess 38A of the device layer 3A.
  • the region in the recess 38A of the device layer 3A includes a range in which the mounting region 31A moves when viewed from the ZA axis direction, and should be separated from the support layer 2A in the mounting region 31A and the drive region 32A.
  • a gap for separating the portion from the support layer 2A is formed.
  • a part of each locking portion 55A of the movable mirror 5A is located in a region in the recess 38A of the device layer 3A.
  • each leg 54A and a part of each locking part 55A of the movable mirror 5A are located in the space S1A, and the movable mirror 5A
  • the mirror surface 51aA may be located on the opposite side of the support layer 2A from the device layer 3A.
  • the mirror surface 61aA of the fixed mirror 6A and the optical functional surface 7aA of the beam splitter 7A are also located on the opposite side of the support layer 2A from the device layer 3A.
  • the device layer 3A is integrally provided with a spacer 39A protruding to the side opposite to the support layer 2A.
  • the spacer 39A protrudes from a portion of each locking portion 55A of the movable mirror 5A that protrudes from the device layer 3A to the side opposite to the support layer 2A, and protects the portion.
  • the opening 31bA communicates with the main surface BsA through a space defined by the spacer 39A.
  • the opening 31bA communicates with another main surface that is a surface opposite to the main surface BsA via the space S1A.
  • the movable mirror 5A has been described with respect to the case where the entire mirror surface 51aA protrudes from the main surface BsA or the surface of the base BA opposite to the main surface BsA.
  • the aspect of the movable mirror 5A is not limited to this case.
  • a part of the mirror surface 51aA of the movable mirror 5A may be disposed inside the base BA. This example will be described below.
  • the movable mirror 5AA is movable in that it has a support portion 56AA in place of the support portion 56A, compared to the movable mirror 5A shown in FIG. This is different from the mirror 5A.
  • the relationship between the support portion 56AA and the elastic portion 52A is the same as that of the support portion 56A.
  • the support portion 56AA is different from the support portion 56A in that the leg portion 54A is not included.
  • the entire support portion 56AA is the locking portion 55A. Accordingly, the support portion 56AA has a symmetrical shape with respect to the center line CLA of the mirror surface 51aA in the ZA axis direction, and does not have a portion that extends relatively long on one side of the center line CLA. For this reason, here, the support portion 56AA supports the movable mirror 5AA in a state where the entire movable mirror 5AA penetrates the mounting region 31A through the opening 31bA.
  • the mirror surface 51aA intersects the mounting area 31A.
  • a part (center portion) of the locking portion 55A overlaps the mirror portion 51A along the YA axis direction.
  • the movable mirror 5AA is locked to the device layer 3A at the locking portion 55A and supported by the mounting region 31A. Therefore, compared with the case where the movable mirror 5A is supported by the support portion 56A (leg portion 54A) that extends relatively long on one side of the center line CLA, the deviation between the support point and the center of gravity is small, and stable mounting is achieved. It is feasible.
  • the support portion 56AA supports the movable mirror 5AA so that the center line CLA of the mirror surface 51aA in the ZA axis direction coincides with the center in the thickness direction of the device layer 3A. Therefore, a part (here, half or more) of the mirror surface 51aA is located on the support layer 2A side with respect to the main surface BsA.
  • the opening 31bA is extended and opened so as to reach the end of the mounting region 31A on the side facing the mirror surface 51aA. Therefore, even in this case, by controlling the optical path of the measurement light L0A toward the mirror surface 51aA, the measurement light L0A can be prevented from interfering with the mounting region 31A, and the entire mirror surface 51aA can be used effectively. .
  • the support portion 56AA (here, the entire movable mirror 5AA) is formed symmetrically with respect to the center line CLA of the mirror surface 51aA in the ZA axis direction.
  • the movable mirror 5AA is supported by the support portion 56AA at a position corresponding to the center line CLA. Therefore, the support point and the center of gravity are substantially matched in the ZA axis direction, and more stable mounting can be realized.
  • the fixed mirror 6A is mounted on the device layer 3A.
  • the fixed mirror 6A may be mounted on the support layer 2A or the intermediate layer 4A.
  • the beam splitter 7A is mounted on the support layer 2A.
  • the beam splitter 7A may be mounted on the device layer 3A or the intermediate layer 4A.
  • the beam splitter 7A is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1A may include a light emitting element that generates measurement light to be incident on the light incident portion 8A in addition to the light incident portion 8A.
  • the optical module 1A may include a light emitting element that generates measurement light incident on the interference optical system 10A, instead of the light incident portion 8A.
  • the optical module 1A may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9A in addition to the light emitting unit 9A.
  • the optical module 1A may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10A, instead of the light emitting unit 9A.
  • first through electrode electrically connected to each actuator region 33A and the second through electrode electrically connected to each of both end portions 34aA of each elastic support region 34A are the support layer 2A and the intermediate layer 4A. (Only the support layer 2A when the intermediate layer 4A does not exist) is provided, and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31A is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1A is not limited to the one constituting the FTIR, and may constitute another optical system.
  • the movable mirror 5A may include a plurality of connecting portions (first connecting portions) 53A that connect the mirror portion 51A and the elastic portion 52A to each other.
  • the movable mirror 5A has a pair of connecting portions 53A.
  • the pair of connecting portions 53A are arranged at positions different from the pair of connecting portions 57A.
  • the pair of connecting portions 53A are distributed and arranged on both sides of the center line CLA.
  • the pair of connecting portions 53A are disposed at positions symmetrical with respect to the center line CLA. Therefore, here, the entire elastic portion 52A and the movable mirror 5A are configured symmetrically with respect to a straight line connecting the pair of connecting portions 53A.
  • the movable mirror 5A has three connecting portions 53A.
  • the three connecting portions 53A are arranged at positions different from the pair of connecting portions 57A.
  • one connecting portion 53A and two connecting portions 53A among the three connecting portions 53A are distributed and arranged on both sides of the center line CLA.
  • the movable mirror 5A has four connecting portions 53A.
  • the four connecting portions are arranged at positions different from the pair of connecting portions 57A.
  • the four connecting portions 53A are distributed and arranged on both sides of the center line CLA.
  • the movable mirror 5A can have a plurality of elastic portions 52A.
  • the movable mirror 5A has a pair of elastic portions 52A.
  • the pair of elastic portions 52A are each formed in an annular plate shape and are arranged concentrically with each other.
  • one elastic part 52A is provided so as to surround the mirror part 51A
  • another elastic part 52A is provided so as to surround the one elastic part 52A and the mirror part 51A.
  • Each of the elastic portions 52A forms an annular area CAA.
  • the elastic portion 52A is not limited to an annular plate shape, and may be an elliptical ring plate shape as shown in FIG. That is, the elastic portion 52A may be elliptical when viewed from the direction intersecting the mirror surface 51aA (XA axis direction).
  • the pair of connecting portions 53A are arranged at positions corresponding to the major axis of the ellipse of the elastic portion 52A.
  • the pair of connecting portions 57A is disposed at a position corresponding to the short axis of the ellipse of the elastic portion 52A.
  • the movable mirror 5A includes a pair of rectangular plate-like elastic portions 52A and a pair of plate-like connection portions 58A that connect the elastic portions 52A to each other.
  • the elastic parts 52A are arranged on both sides of the mirror part 51A so as to sandwich the mirror part 51A in the YA axis direction.
  • the elastic portion 52A extends along the ZA axis direction substantially parallel to the support portion 56A.
  • 58 A of connection parts are provided in the both ends of the longitudinal direction of 52 A of elastic parts, and connect 52 A of elastic parts.
  • a rectangular annular region CAA is formed by the elastic portion 52A and the connecting portion 58A.
  • a single connecting portion 53A connects the elastic portion 52A and the mirror portion 51A to each other via the connecting portion 58A.
  • the movable mirror 5A has a pair of elastic portions 52A.
  • the elastic portions 52A are arranged on both sides of the mirror portion 51A so as to sandwich the mirror portion 51A in the ZA axis direction.
  • the elastic portions 52A are each formed in a corrugated plate shape. That is, when viewed from the XA axis direction, the elastic portion 52A has a wave shape (here, a rectangular wave shape).
  • Each of the elastic parts 52A is connected to the support part 56A at both ends thereof.
  • a substantially rectangular annular area CAA is formed by the elastic portion 52A and the support portion 56A.
  • the connecting portion 53A connects the support portion 56A and the mirror portion 51A to each other.
  • the mirror part 51A may be connected to the support part 56A.
  • the movable mirror 5A has a pair of elastic portions 52A.
  • the elastic portions 52A are arranged on both sides of the mirror portion 51A so as to sandwich the mirror portion 51A in the ZA axis direction.
  • Each of the elastic portions 52A is formed in a V-shaped plate shape. That is, the elastic part 52A is V-shaped when viewed from the XA axis direction.
  • Each of the elastic parts 52A is connected to the support part 56A at both ends thereof. Thereby, here, a substantially rectangular annular area CAA is formed by the elastic portion 52A and the support portion 56A.
  • the connecting portion 53A connects the support portion 56A and the mirror portion 51A to each other.
  • the elastic portion 52A includes a pair of semicircular portions arranged in opposite directions as viewed from the XA axis direction, and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape.
  • the elastic portion 52A includes a pair of semicircular portions arranged in the same direction as viewed from the XA axis direction and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape.
  • the elastic portion 52A may be formed in a shape in which a part of the ring is notched as viewed from the XA axis direction.
  • the elastic portion 52A has a shape in which a pair of notches 52cA are provided on both sides of the center line CLA with respect to the ring. That is, here, the elastic portion 52A is composed of a pair of arcuate portions 52dA that are separated from each other in the cutout portion 52cA.
  • the connecting portion 53A connects the elastic portion 52A and the mirror portion 51A to each other at each end of the arc-shaped portion 52dA.
  • one circular area CAA is formed by one arcuate part 52dA, a pair of connecting parts 53A connected to the one arcuate part 52dA, and the mirror part 51A.
  • the elastic portion 52A is configured as a single arc-shaped portion 52dA by a single notch 52cA.
  • the connecting portion 53A connects the elastic portion 52A and the mirror portion 51A to each other at the end of the elastic portion 52A.
  • the annular portion CAA is formed by the elastic portion 52A, the pair of connecting portions 53A, and the mirror portion 51A.
  • the connecting portion 53A connects the support portion 56A and the mirror portion 51A via the notch portion 52cA. That is, the mirror part 51A may be directly connected to the support part 56A.
  • the shape of the locking portion 55A is changed compared to the configuration shown in FIG.
  • the engaging portion 55A extends from the leg portion 54A in the opposite direction to the connecting portion 57A (the ZA axis negative direction) and terminates. That is, the locking portion 55A includes the end portion 55cA.
  • the locking portion 55A includes a protruding portion 55dA that protrudes toward the other locking portion 55A from a position closer to the connecting portion 57A than the end portion 55cA.
  • the protrusion 55dA includes an inclined surface 55bA.
  • the end 55cA and the inclined surface 55bA face each other along the ZA axis direction.
  • the end 55cA is in contact with the peripheral edge of the opening 31bA on the main surface BsA.
  • the inclined surface 55bA is in contact with the edge of the opening 31bA opposite to the main surface BsA. Accordingly, the locking portion 55A is locked to the mounting area 31A so as to sandwich the mounting area 31A in the ZA axis direction. That is, also here, the support portion 56A includes a locking portion 55A that is bent so as to abut against a pair of edges of the opening 31bA in a direction intersecting the main surface BsA. As a result, the movable mirror 5A is prevented from coming off the base BA in the ZA axis direction.
  • the locking portion 55A has an inclined surface 55aA and is bent and terminated so as to be folded back toward the connecting portion 57A on the tip side of the inclined surface 55aA. That is, the locking portion 55A includes the end portion 55cA.
  • the end 55cA and the inclined surface 55aA face each other along the ZA axis direction.
  • the end 55cA is in contact with the peripheral edge of the opening 31bA on the surface opposite to the main surface BsA.
  • the inclined surface 55aA is in contact with the edge of the opening 31bA on the main surface BsA side. Accordingly, the locking portion 55A is locked to the mounting area 31A so as to sandwich the mounting area 31A in the ZA axis direction.
  • the support portion 56A includes a locking portion 55A that is bent so as to abut against a pair of edges of the opening 31bA in a direction intersecting the main surface BsA. As a result, the movable mirror 5A is prevented from coming off the base BA in the ZA axis direction.
  • the movable mirror 5AA shown in FIG. 23A further includes a pair of handle portions 59A.
  • the elastic portion 52A is composed of a semicircular leaf spring 52aA and a leaf spring 52bA.
  • the leaf springs 52aA and 52bA are arranged in opposite directions and are connected to each other by a support portion 56AA (locking portion 55A).
  • a support portion 56AA locking portion 55A.
  • an approximately elliptical annular region CAA is formed by the elastic portion 52A and the support portion 56AA.
  • the handle portion 59A is disposed inside the annular area CAA.
  • the handle portion 59A has a U shape, and both ends thereof are connected to the support portion 56AA.
  • the pair of support portions 56AA and the pair of handle portions 59A are arranged in a line on the center line CLA.
  • the connecting portion 53A is connected to one handle portion 59A. Therefore, the connecting portion 53A connects the support portion 56AA and the mirror portion 51A to each other via the handle portion 59A.
  • a force is applied to the handle portion 59A so that the handle portions 59A approach each other while the pair of handle portions 59A are gripped, so that the elastic portion 52A is compressed along the YA axis direction. Can be elastically deformed.
  • the handle portion 59A may be provided on the elastic portion 52A.
  • the handle portion 59A protrudes outside the annular area CAA.
  • the pair of handle portions 59A are distributed and arranged on both sides of the center line CLA.
  • the pair of handle portions 59A are arranged at symmetrical positions with respect to the center line CLA.
  • the elastic portion 52A is compressed along the YA axis direction. Can be elastically deformed.
  • the pair of support portions 56AA and the pair of handle portions 59A are arranged in a line along the center line CLA, they protrude outside the annular region CAA.
  • the handle portion 59A may be connected to the support portion 56AA.
  • the shape of the opening 31bA when viewed from the ZA axis direction may be a triangle.
  • the inner surface of the opening 31bA includes a pair of inclined surfaces SLA and a reference surface SRA.
  • the one ends SLaA of the inclined surfaces SLA are connected to each other.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the engagement portion 55A being inscribed at the corner defined by the inclined surface SLA and the reference surface SRA.
  • the shape of the opening 31bA when viewed from the ZA axis direction is a hexagon.
  • the inner surface of the opening 31bA includes a pair of inclined surfaces SLA and a pair of inclined surfaces SKA inclined to the opposite side of the inclined surface SLA.
  • the pair of inclined surfaces SKA are inclined so that the distance from each other increases from one end SkaA to the other end SKbA.
  • the other end SLbA of the inclined surface SLA and the other end SKbA of the inclined surface SKA are connected to each other to form one corner.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the locking portion 55A being inscribed at the corner defined by the inclined surface SLA and the inclined surface SKA.
  • one locking portion 55A contacts the inner surface of the opening 31bA at two points.
  • the inclined surface SLA may be a curved surface.
  • the pair of inclined surfaces SLA are inclined and curved so that the distance increases from one end SLaA to the other end SLbA.
  • the inclined surface SLA is curved such that the inclination of the tangent to the inclined surface SLA with respect to the XA axis gradually increases from one end SLaA to the other end SLbA.
  • the inclined surface SLA is curved so as to be convex toward the inside of the opening 31bA.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by inscribed the engaging portion 55A in the corner defined by the inclined surface SLA and the reference surface SRA. is there.
  • both the inclined surface SLA and the inclined surface SKA are curved surfaces that are convex toward the inside of the opening 31bA.
  • the other end SLbA of the inclined surface SLA and the other end SKbA of the inclined surface SKA are connected to each other via a connection surface extending along the XA axis direction.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the locking portion 55A being inscribed at the corner defined by the inclined surface SLA and the inclined surface SKA.
  • each of the two portions 31pA has an inclined surface SLA and a reference surface SRA. That is, here, the reference surface SRA is also divided into two parts.
  • the reference surface SRA when viewed from the ZA axis direction, the reference surface SRA as a whole is connected to the other end SLbA of the inclined surface SLA of the one portion 31pA and the other end SLbA of the inclined surface SLA of the other portion 31pA. It extends along.
  • one locking portion 55A is inserted into one portion 31pA of the opening 31bA.
  • the engaging portion 55A is inscribed in the corner defined by the inclined surface SLA and the reference surface SRA, so that the movable mirror 5A can be positioned in both the XA axis direction and the YA axis direction.
  • each of the two portions 31pA has an inclined surface SLA and an inclined surface SKA.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the locking portion 55A being inscribed at the corner defined by the inclined surface SLA and the inclined surface SKA.
  • the shape of the opening 31bA when viewed from the ZA axis direction is a rhombus.
  • the inner surface of the opening 31bA may be constituted by the inclined surface SLA and the inclined surface SKA. That is, here, in addition to the inclined surface SLA and the inclined surface SKA being connected to each other, the one ends SLaA of the inclined surfaces SLA are connected to each other, and the one ends SkaA of the inclined surfaces SKA are connected to each other.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the locking portion 55A being inscribed at the corner defined by the inclined surface SLA and the inclined surface SKA.
  • the other end SLbA of the inclined surface SLA and the other end SKbA of the inclined surface SKA are connected to each other via a connection surface extending along the XA axis direction.
  • the one ends SLaA of the inclined surfaces SLA are connected to each other, and the one ends SkaA of the inclined surfaces SKA are connected to each other.
  • the movable mirror 5A can be positioned in both the XA-axis direction and the YA-axis direction by the locking portion 55A being inscribed at the corner defined by the inclined surface SLA and the inclined surface SKA.
  • the elastic portion 52A is elastically deformed so as to compress the elastic portion 52A along the direction in which the support portion 56A faces, thereby reducing the interval between the support portions 56A, and then the locking portion 55A into the opening 31bA.
  • the case of inserting was illustrated.
  • the support portion 56A includes a leg portion 54A and a locking portion 55A, but the bending direction of the locking portion 55A is different from the example of FIG. 55 A of latching parts are bent so that it may become convex on the opposite side of a mutual opposing direction between a pair of support parts 56A.
  • the locking portion 55A includes an inclined surface 55aA and an inclined surface 55bA as surfaces (inner surfaces) facing each other between the matching support portions 56A.
  • the inclined surfaces 55aA are inclined so as to be separated from each other in a direction away from the connecting portion 57A (ZA axis negative direction). Further, the inclined surfaces 55bA are inclined so as to approach each other in the negative direction of the ZA axis.
  • the absolute value of the inclination angle with respect to each ZA axis is the same as in the above example.
  • a handle portion 59A is provided for each of the support portions 56A.
  • the handle portion 59A is arranged so as to sandwich the mirror portion 51A and the elastic portion 52A in the YA axis direction.
  • the handle portion 59A and the connecting portion 57A are arranged in a line on the center line CLA.
  • the handle portion 59A is formed in a U-shape, and a hole 59sA is formed between the handle portion 59A and the support portion 56A. Therefore, for example, by inserting an arm into the hole 59sA, it is possible to apply a force to the handle portion 59A so as to increase the interval between the support portions 56A.
  • the handle portion 59A is formed in a straight line shape. Therefore, by gripping the handle portion 59A, a force can be applied to the handle portion 59A so as to increase the interval between the support portions 56A.
  • the elastic portion 52A is elastically deformed so as to be extended in the YA axis direction.
  • the opening 31bA can be deformed as shown in FIG.
  • the opening 31bA is divided into two triangular portions 31pA.
  • the movable mirror 5A shown in FIG. 27 when a part of the elastic deformation of the elastic portion 52A is released in a state where the locking portion 55A is inserted into the opening 31bA, the locking portions 55A are displaced so as to approach each other.
  • an inclined surface SLA is formed as a surface on the center side of the mounting region 31A in the YA axis direction in each portion 31pA of the opening 31bA.
  • the inclined surface SLA includes one end SLaA and the other end SLbA.
  • One end SLaA and the other end SLbA are both ends of the inclined surface SLA when viewed from the ZA axis direction.
  • the pair of inclined surfaces SLA are inclined so as to reduce the distance from one end SLaA toward the other end SLbA (for example, with respect to the XA axis).
  • the reference surface SRA of each portion 31pA extends along a reference line BLA that connects the other end SLbA of one inclined surface SLA and the other end SLbA of the other inclined surface SLA when viewed from the ZA axis direction. Yes.
  • the locking portions 55A slide on the inclined surface SLA toward the reference surface SRA by the component in the XA axis direction of the reaction force from the inclined surface SLA.
  • the locking portion 55A is inscribed in a corner defined by the inclined surface SLA and the reference surface SRA, and is positioned in both the XA axis direction and the YA axis direction (self-aligned by elastic force).
  • the opening 31bA is divided into two rhombus portions 31pA.
  • an inclined surface SLA and an inclined surface SKA are formed as a pair of surfaces on the center side of the mounting region 31A in the YA axis direction.
  • the inclined surface SLA and the inclined surface SLA are inclined to the opposite side.
  • the inclined surfaces SKA are inclined so that the distance from one end SkaA to the other end SKbA decreases.
  • the other end SLbA of the inclined surface SLA and the other end SKbA of the inclined surface SKA are connected to each other to form one corner.
  • the engaging portion 55A is inscribed in the corner portion defined by the inclined surface SLA and the inclined surface SKA, thereby being positioned in both the XA axis direction and the YA axis direction (self-alignment is performed by elastic force). )
  • the modifications of the movable mirrors 5A and 5AA and the opening 31bA are not limited to those described above.
  • the movable mirrors 5A and 5AA and the opening 31bA may be another modified example configured by exchanging arbitrary portions of the above-described modified examples. The same applies to the fixed mirror 6A and the opening 37aA.
  • the movable mirror and the fixed mirror were illustrated as an optical element mounted in base BA.
  • the optical surface is a mirror surface.
  • the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.
  • An optical module comprising an optical element and a base on which the optical element is mounted,
  • the optical element includes an optical part having an optical surface, an elastic part provided around the optical part so as to form an annular region, and the optical part sandwiched in a first direction along the optical surface.
  • a pair of support portions provided with elastic force according to the elastic deformation of the elastic portion and having a mutual distance variable.
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface;
  • the support portion is inserted into the opening in a state where the elastic force of the elastic portion is applied,
  • the optical element is supported by the mounting region by a reaction force of the elastic force applied from the inner surface of the opening to the support portion in a state where the optical surface intersects the main surface.
  • Optical module. [Appendix 2]
  • the base includes a support layer, and a device layer provided on the support layer and including the main surface and the mounting region, The opening passes through the device layer in a direction intersecting the main surface,
  • the support portion includes a locking portion that is bent so as to contact a pair of edges of the opening in a direction intersecting the main surface.
  • the optical module according to Appendix 1.
  • the inner surface of the opening has a pair of inclined surfaces inclined so that the distance from one end to the other end increases as viewed from the direction intersecting the main surface, and the other end and the other of the one inclined surface A reference surface extending along a reference line connecting the other end of the inclined surface,
  • the optical element includes a first connecting part that connects the optical part and the elastic part to each other.
  • the elastic part is formed in an annular shape so as to surround the optical part when viewed from the second direction intersecting the optical surface, thereby forming the annular region.
  • the support part extends beyond the optical surface from the second connection part along a third direction that extends along the optical surface and intersects the first direction, and a second connection part connected to the elastic part. And a leg inserted into the opening,
  • the optical module according to any one of appendices 1 to 5.
  • a fixed mirror mounted on the support layer, the device layer, or an intermediate layer;
  • a beam splitter mounted on the support layer, the device layer, or the intermediate layer, and
  • the optical element is a movable mirror including the optical surface which is a mirror surface;
  • the device layer has a drive region connected to the mounting region,
  • the movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system,
  • the base has the intermediate layer provided between the support layer and the device layer,
  • the support layer is a first silicon layer of an SOI substrate;
  • the device layer is a second silicon layer of the SOI substrate;
  • the intermediate layer is an insulating layer of the SOI substrate.
  • a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
  • a light emitting portion arranged to emit the measurement light to the outside from the interference optical system; Comprising The optical module according to appendix 7 or 8.
  • An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, JP 2012-524295 A).
  • MEMS Micro Electro Mechanical Systems
  • Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.
  • US Patent Application Publication No. 2002/0186477 describes an optical system manufacturing process.
  • a template substrate and an optical bench are prepared.
  • An alignment slot is formed on the template substrate by etching.
  • Bond pads are arranged on the main surface of the optical bench.
  • the template substrate is attached to the main surface of the optical bench so that the alignment slot is disposed on the bond pad.
  • the optical element is inserted into the alignment slot while being positioned using the side wall of the alignment slot, and is positioned on the bond pad. Then, the optical element is bonded to the optical bench by reflowing the bond pad.
  • the optical module as described above has the following problems in that, for example, the size of the movable mirror depends on the achievement level of deep processing on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.
  • Another object of the present disclosure is to provide an optical module that can reliably mount an optical element regardless of the characteristics of the mounting region, and a mounting method thereof.
  • An optical module includes an optical element and a base on which the optical element is mounted.
  • the optical element opposes an optical part having an optical surface and an elastic part that can be elastically deformed.
  • a pair of support portions that are provided with an elastic force according to elastic deformation of the elastic portion and whose distance is variable, and the elastic portion is configured so that the distance between the pair of support portions changes.
  • a handle used for elastic deformation the base has a main surface and a mounting region provided with an opening communicating with the main surface, and the pair of support portions are elastic forces of the elastic portions.
  • the optical element is supported in the mounting area by the reaction force of the elastic force applied from the inner surface of the opening, and the handle is optically mounted in the state where the optical element is mounted in the mounting area.
  • Part and a pair of support parts on the main surface Located on one side in a direction difference.
  • the optical element has an elastic part and a pair of support parts whose distances can be changed according to the elastic deformation of the elastic part.
  • an opening communicating with the main surface is formed in the mounting region of the base on which the optical element is mounted. Therefore, as an example, the support portion is inserted into the opening in a state in which the elastic portion is elastically deformed so that the distance between the support portions is reduced, and a part of the elastic deformation of the elastic portion is released, so that the support portion is opened in the opening. The distance between each other increases, and the support portion can be brought into contact with the inner surface of the opening. Thereby, an optical element is supported by the reaction force provided to a support part from the inner surface of opening.
  • the optical element is mounted on the base using the elastic force. Therefore, it is possible to reduce the amount of adhesive used or eliminate the need for an adhesive, and to reliably perform the optical element without considering the influence of the adhesive or the like, that is, regardless of the characteristics of the mounting area. Can be implemented.
  • the optical element has a handle used for elastically deforming the elastic portion so that the distance between the pair of support portions changes.
  • the handle is located on one side in the direction intersecting the main surface with respect to the optical part and the pair of support parts in a state where the optical element is mounted in the mounting region. For this reason, in a state where the elastic portion is elastically deformed using the handle and the distance between the pair of support portions is changed, the optical portion is unlikely to hinder the work when the pair of support portions are inserted into the openings. Therefore, the optical element can be easily mounted on the base. Therefore, according to this optical module, the mounting process of the optical module can be facilitated.
  • the handle may be used to reduce the distance between the pair of support parts, or may be used to increase the distance between the pair of support parts. May be. According to this, the structure for easy mounting of an optical element is suitably realizable.
  • the handle may have a pair of displacement portions that change a distance between the pair of support portions by displacing in a direction away from each other, or a direction in which the handles approach each other.
  • You may have a pair of displacement part which changes the distance between a pair of support parts by displacing to. According to this, the optical element can be more easily mounted on the base.
  • the pair of displacement portions is formed on the principal surface when viewed from a direction perpendicular to both the direction intersecting the principal surface and the direction in which the pair of displacement portions face each other. You may incline and arrange
  • the bonder head that has entered between the pair of displacement parts from one side in the direction intersecting the main surface is pressed against the pair of displacement parts, and on the pair of displacement parts toward the other side in the direction.
  • the pair of displacement portions can be displaced in directions away from each other. Therefore, the mounting process of the optical module can be further facilitated.
  • the handle may be positioned on one side in the direction intersecting the main surface with respect to the elastic portion in a state where the optical element is mounted in the mounting region. According to this, in a state in which the elastic portion is elastically deformed using the handle and the distance between the pair of support portions is changed, the elastic portion obstructs the work when the pair of support portions is inserted into the opening. hard. Therefore, the optical element can be more easily mounted on the base.
  • the base includes a support layer and a device layer provided on the support layer and including a main surface and a mounting region, and the opening intersects the main surface.
  • the device layer may penetrate the device layer in a direction
  • the support portion may include a locking portion that is bent so as to contact a pair of edges of the opening in a direction intersecting the main surface.
  • the locking portion is locked to the mounting region at a position where the locking portion contacts the pair of edges of the opening. For this reason, the optical element can be reliably mounted on the base, and the optical element can be positioned in the direction intersecting the main surface of the base.
  • An optical module includes a fixed mirror, a support layer, and a device mounted on at least one of a support layer, a device layer, and an intermediate layer provided between the support layer and the device layer. And a beam splitter mounted on at least one of the intermediate layers, the optical element is a movable mirror including an optical surface that is a mirror surface, and the device layer is a drive region connected to the mounting region.
  • the movable mirror, the fixed mirror, and the beam splitter may be arranged to constitute an interference optical system. In this case, an FTIR with improved sensitivity can be obtained.
  • the mounting area where the movable mirror is mounted has a characteristic of being connected to the driving area and driven. Therefore, the above configuration is more effective because it is easily affected by the adverse effects of the adhesive.
  • the base includes an intermediate layer provided between the support layer and the device layer, and the support layer is the first silicon layer of the SOI substrate.
  • the layer may be a second silicon layer of the SOI substrate, and the intermediate layer may be an insulating layer of the SOI substrate.
  • a configuration for reliably mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.
  • An optical module is disposed so that measurement light is incident on the interference optical system from the outside and the measurement light is emitted from the interference optical system to the outside.
  • a light emitting portion In this case, an FTIR including a light incident part and a light emission part can be obtained.
  • the optical module mounting method includes a first step of inserting the pair of support portions into the opening in a state where the distance between the pair of support portions is changed by applying a force to the handle. And a second step of fixing the optical element to the base by releasing the force applied to the handle to bring the pair of support portions into contact with the inner surface of the opening.
  • the optical element is mounted based on the elastic force of the elastic part.
  • the pair of support portions is inserted into the opening.
  • the handle is provided so as to be positioned on one side in the direction intersecting the main surface with respect to the optical portion and the pair of support portions in a state where the optical element is mounted in the mounting region, The department is unlikely to interfere with work. Therefore, in a state where the distance between the pair of support portions is changed, the pair of support portions can be easily inserted into the opening. Therefore, according to this optical module mounting method, the optical module mounting process is facilitated.
  • an optical module that can reliably mount an optical element regardless of characteristics of a mounting region.
  • the optical module 1B includes a base BB.
  • the base BB includes a main surface BsB.
  • the base BB includes a support layer 2B, a device layer 3B provided on the support layer 2B, and an intermediate layer 4B provided between the support layer 2B and the device layer 3B.
  • the main surface BsB is a surface of the device layer 3B opposite to the support layer 2B.
  • the support layer 2B, the device layer 3B, and the intermediate layer 4B are configured by an SOI substrate.
  • the support layer 2B is the first silicon layer of the SOI substrate.
  • the device layer 3B is a second silicon layer of the SOI substrate.
  • the intermediate layer 4B is an insulating layer of the SOI substrate.
  • the support layer 2B, the device layer 3B, and the intermediate layer 4B have a rectangular shape with, for example, a side of about 10 mm when viewed from the ZB axis direction (a direction parallel to the ZB axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2B and the device layer 3B is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4B is, for example, about several ⁇ m.
  • the device layer 3B and the intermediate layer 4B are shown with one corner of the device layer 3B and one corner of the intermediate layer 4B cut out.
  • the device layer 3B has a mounting area 31B and a drive area 32B connected to the mounting area 31B.
  • the drive region 32B includes a pair of actuator regions 33B and a pair of elastic support regions 34B.
  • the mounting region 31B and the drive region 32B (that is, the mounting region 31B and the pair of actuator regions 33B and the pair of elastic support regions 34B) are integrally formed on a part of the device layer 3B by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33B are disposed on both sides of the mounting region 31B in the XB axis direction (a direction parallel to the XB axis perpendicular to the ZB axis). That is, the mounting region 31B is sandwiched between the pair of actuator regions 33B in the XB axis direction.
  • Each actuator region 33B is fixed to the support layer 2B via the intermediate layer 4B.
  • a first comb tooth portion 33aB is provided on the side surface of each actuator region 33B on the mounting region 31B side.
  • Each first comb tooth portion 33aB is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the first comb tooth portion 33aB.
  • a first electrode 35B is provided in each actuator region 33B.
  • the pair of elastic support regions 34B are disposed on both sides of the mounting region 31B in the YB axis direction (a direction parallel to the YB axis perpendicular to the ZB axis and the XB axis). That is, the mounting region 31B is sandwiched between the pair of elastic support regions 34B in the YB axis direction. Both end portions 34aB of each elastic support region 34B are fixed to the support layer 2B via the intermediate layer 4B.
  • Each elastic support region 34B has an elastic deformation portion 34bB (a portion between both end portions 34aB) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34B is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below it.
  • a second electrode 36B is provided at each of both end portions 34aB.
  • each elastic support region 34B is connected to the mounting region 31B.
  • the mounting region 31B is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the mounting region 31B. That is, the mounting area 31B is supported by the pair of elastic support areas 34B.
  • a second comb tooth portion 31aB is provided on the side surface of each mounting region 31B on the side of each actuator region 33B.
  • Each second comb tooth portion 31aB is in a state of floating with respect to the support layer 2B by removing the intermediate layer 4B immediately below the second comb tooth portion 31aB.
  • the comb teeth of the first comb tooth portion 33aB are located between the comb teeth of the second comb tooth portion 31aB.
  • the pair of elastic support regions 34B sandwich the mounting region 31B from both sides when viewed from the direction AB parallel to the XB axis.
  • the mounting region 31B moves along the direction AB, the mounting region 31B returns to the initial position.
  • an elastic force is applied to the mounting region 31B. Therefore, when a voltage is applied between the first electrode 35B and the second electrode 36B and an electrostatic attractive force acts between the first comb tooth portion 33aB and the second comb tooth portion 31aB facing each other, the electrostatic attractive force
  • the mounting region 31B is moved along the direction AB to a position where the elastic force of the pair of elastic support regions 34B is balanced.
  • the drive region 32B functions as an electrostatic actuator.
  • the optical module 1B further includes a movable mirror 5B, a fixed mirror 6B, a beam splitter 7B, a light incident part 8B, and a light emitting part 9B.
  • the movable mirror 5B, the fixed mirror 6B, and the beam splitter 7B are arranged on the device layer 3B so as to constitute an interference optical system 10B that is a Michelson interference optical system.
  • the movable mirror 5B is mounted on the mounting region 31B of the device layer 3B on one side of the beam splitter 7B in the XB axis direction.
  • the mirror surface 51aB of the mirror part 51B of the movable mirror 5B is located on the opposite side of the support layer 2B with respect to the device layer 3B.
  • the mirror surface 51aB is, for example, a surface perpendicular to the XB axis direction (that is, a surface perpendicular to the direction AB) and faces the beam splitter 7B side.
  • the fixed mirror 6B is mounted on the mounting region 37B of the device layer 3B on one side of the beam splitter 7B in the YB axis direction.
  • the mirror surface 61aB of the mirror part 61B of the fixed mirror 6B is located on the opposite side of the support layer 2B with respect to the device layer 3B.
  • the mirror surface 61aB is, for example, a surface perpendicular to the YB axis direction and faces the beam splitter 7B side.
  • the light incident part 8B is mounted on the device layer 3B on the other side of the beam splitter 7B in the YB axis direction.
  • the light incident portion 8B is configured by, for example, an optical fiber and a collimator lens.
  • the light incident portion 8B is arranged so that the measurement light is incident on the interference optical system 10B from the outside.
  • the light emitting portion 9B is mounted on the device layer 3B on the other side of the beam splitter 7B in the XB axis direction.
  • the light emitting portion 9B is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting unit 9B is arranged to emit measurement light (interference light) to the outside from the interference optical system 10B.
  • the beam splitter 7B is a cube type beam splitter having an optical functional surface 7aB.
  • the optical functional surface 7aB is located on the side opposite to the support layer 2B with respect to the device layer 3B.
  • the beam splitter 7B is positioned by bringing one corner on the bottom side of the beam splitter 7B into contact with one corner of the rectangular opening 3aB formed in the device layer 3B.
  • the beam splitter 7B is mounted on the support layer 2B by being fixed to the support layer 2B by bonding or the like in a positioned state.
  • the optical module 1B configured as described above, when the measurement light L0B is incident on the interference optical system 10B from the outside via the light incident portion 8B, a part of the measurement light L0B is transmitted to the optical function surface 7aB of the beam splitter 7B.
  • the reflected light travels toward the movable mirror 5B, and the remaining portion of the measurement light L0B passes through the optical function surface 7aB of the beam splitter 7B and travels toward the fixed mirror 6B.
  • Part of the measurement light L0B is reflected by the mirror surface 51aB of the movable mirror 5B, travels on the same optical path toward the beam splitter 7B, and passes through the optical function surface 7aB of the beam splitter 7B.
  • the remaining part of the measurement light L0B is reflected by the mirror surface 61aB of the fixed mirror 6B, travels on the same optical path toward the beam splitter 7B, and is reflected by the optical function surface 7aB of the beam splitter 7B.
  • a part of the measurement light L0B that has passed through the optical functional surface 7aB of the beam splitter 7B and the remaining part of the measurement light L0B reflected by the optical functional surface 7aB of the beam splitter 7B become the measurement light L1B that is interference light.
  • L1B is emitted to the outside from the interference optical system 10B via the light emitting portion 9B.
  • the movable mirror 5B can be reciprocated at high speed along the direction AB, so that a small and highly accurate FTIR can be provided.
  • the movable mirror (optical element) 5B includes a mirror part (optical part) 51B having a mirror surface (optical surface) 51aB, an elastic part 52B that can be elastically deformed, It has a connecting portion 53B that connects the mirror portion 51B and the elastic portion 52B to each other, a pair of support portions 54B, and a handle 56B.
  • the movable mirror 5B has a base BB mounting region 31B in a state where the mirror surface 51aB is located on a plane intersecting (for example, orthogonal to) the main surface BsB and the mirror surface 51aB is located on the main surface BsB side of the base BB. Has been implemented.
  • the mirror part 51B is formed in a plate shape (for example, a disk shape) having the mirror surface 51aB as a main surface.
  • a flat portion 51bB having a flat surface on the ZB-axis positive direction side is provided at one edge (ZB-axis positive direction side) of the edge in the direction (ZB-axis direction) intersecting the main surface BsB.
  • the elastic part 52B is formed so as to surround the mirror part 51B while being separated from the mirror part 51B when viewed from the direction intersecting the mirror surface 51aB (XB axis direction).
  • the elastic part 52B has an annular shape in which a part from the annular shape to the ZB-axis positive direction side is missing.
  • the connecting portion 53B extends along the center line CLB and connects the edge portion on the ZB-axis negative direction side in the mirror portion 51B and the elastic portion 52B to each other.
  • the center line CLB is a virtual straight line that passes through the center of the mirror surface 51aB when viewed from the XB axis direction and extends in the ZB axis direction.
  • the pair of support portions 54B each have a rectangular cross section, and are provided to face each other in the direction along the mirror surface 51aB and the main surface BsB (YB axis direction).
  • the pair of support portions 54B is connected to the elastic portion 52B on each of one side and the other side in the YB axis direction with respect to the center line CLB.
  • the pair of support portions 54B is located on the ZB-axis negative direction side with respect to the mirror portion 51B.
  • Each support portion 54B includes a locking portion 55B.
  • Each of the pair of locking portions 55B is formed to be bent in, for example, a V shape on the inner side (side approaching each other) when viewed from the XB axis direction.
  • the entire support portion 54B is a locking portion 55B.
  • Each locking portion 55B includes an inclined surface 55aB and an inclined surface 55bB.
  • the inclined surface 55aB and the inclined surface 55bB are surfaces opposite to the surfaces facing each other in the pair of locking portions 55B (outer surfaces).
  • the inclined surfaces 55aB are inclined so as to approach each other as they go in the negative direction of the ZB axis.
  • the inclined surfaces 55bB are inclined so as to be separated from each other in the negative direction of the ZB axis.
  • the handle 56B has a pair of displacement portions 56aB connected to both ends of the elastic portion 52B.
  • the pair of displacement portions 56aB each have a bar shape with a rectangular cross section, and are provided so as to face each other in the YB axis direction.
  • Each displacement part 56aB is extended toward the ZB-axis positive direction from the edge part of the elastic part 52B.
  • the pair of displacement portions 56aB are in the ZB axis positive direction when viewed from the XB axis direction (the ZB axis direction intersecting the main surface BsB and the direction perpendicular to the YB axis direction where the pair of displacement portions 56aB face each other). It is inclined and arranged so that the distance between each other increases as it goes.
  • the pair of displacement portions 56aB are located on the ZB axis positive direction side with respect to the mirror portion 51B, the elastic portion 52B, and the pair of support portions 54B in a state where the movable mirror 5B is mounted in the mounting region 31B.
  • the pair of support portions 54B are connected to the elastic portion 52B, and the elastic portion 52B is connected to the pair of displacement portions 56aB. That is, the pair of displacement portions 56aB is connected to the pair of support portions 54B via the elastic portion 52B. Therefore, for example, by applying a force to the pair of displacement portions 56aB so as to be displaced away from each other, the elastic portion 52B is elastically deformed so as to extend in the YB axis direction, and the distance between the pair of support portions 54B is increased. Can be reduced. That is, the distance between the pair of support portions 54B along the YB axis direction is variable according to the elastic deformation of the elastic portion 52B. Further, the elastic force of the elastic portion 52B can be applied to the pair of support portions 54B.
  • an opening 31bB is formed in the mounting region 31B of the base BB.
  • the opening 31bB extends in the ZB axis direction and penetrates the device layer 3B. Therefore, the opening 31bB communicates with (is led to) the main surface BsB and the surface of the device layer 3B opposite to the main surface BsB.
  • the opening 31bB has a columnar shape that is trapezoidal when viewed from the ZB-axis direction (see FIG. 32). Details of the opening 31bB will be described later.
  • each support portion 54B (that is, the movable mirror 5B) penetrates the mounting region 31B through the opening 31bB. More specifically, a part of the locking portion 55B among the support portions 54B is located in the opening 31bB. In this state, each locking portion 55B is in contact with a pair of edges (the edge on the main surface BsB side and the edge on the opposite side of the main surface BsB) of the opening 31bB in the ZB axis direction.
  • the inclined surface 55aB is in contact with the edge of the opening 31bB on the main surface BsB side, and the inclined surface 55bB is in contact with the edge of the opening 31bB on the opposite side of the main surface BsB.
  • locking part 55B is latched by the mounting area
  • the movable mirror 5B is prevented from coming off the base BB in the ZB axis direction.
  • an opening 41B is formed in the intermediate layer 4B.
  • the openings 41B are opened on both sides of the intermediate layer 4B in the ZB axis direction.
  • An opening 21B is formed in the support layer 2B.
  • the openings 21B are opened on both sides of the support layer 2B in the ZB axis direction.
  • a continuous space S1B is configured by the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B. That is, the space S1B includes a region in the opening 41B of the intermediate layer 4B and a region in the opening 21B of the support layer 2B.
  • the space S1B is formed between the support layer 2B and the device layer 3B, and corresponds to at least the mounting region 31B and the drive region 32B.
  • the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B include a range in which the mounting region 31B moves when viewed from the ZB axis direction.
  • the region in the opening 41B of the intermediate layer 4B is a portion that should be separated from the support layer 2B in the mounting region 31B and the drive region 32B (that is, a portion that should be in a floating state with respect to the support layer 2B.
  • a gap for separating the entire mounting region 31B, the elastic deformation portion 34bB, the first comb tooth portion 33aB, and the second comb tooth portion 31aB) of each elastic support region 34B from the support layer 2B is formed.
  • each locking portion 55B of the movable mirror 5B is located in the space S1B. Specifically, a part of each locking portion 55B is located in a region in the opening 21B of the support layer 2B via a region in the opening 41B of the intermediate layer 4B. A part of each locking portion 55B protrudes from the surface on the intermediate layer 4B side in the device layer 3B into the space S1B, for example, about 100 ⁇ m. As described above, the region in the opening 41B of the intermediate layer 4B and the region in the opening 21B of the support layer 2B include the range in which the mounting region 31B moves when viewed from the ZB axis direction. Is reciprocated along the direction AB, a part of the locking portions 55B of the movable mirror 5B located in the space S1B does not come into contact with the intermediate layer 4B and the support layer 2B.
  • the inner surface of the opening 31bB includes a pair of inclined surfaces SLB and a reference surface SRB.
  • the inclined surface SLB includes one end SLaB and the other end SLbB.
  • One end SLaB and the other end SLbB are both ends of the inclined surface SLB when viewed from the ZB-axis direction.
  • the pair of inclined surfaces SLB is inclined (for example, with respect to the XB axis) so that the distance from each other increases from one end SLaB to the other end SLbB.
  • the reference surface SRB extends along a reference line BLB that connects the other end SLbB of one inclined surface SLB and the other end SLbB of the other inclined surface SLB when viewed from the ZB axis direction.
  • the reference surface SRB connects the other ends SLbB to each other.
  • the shape of the opening 31bB when viewed from the ZB-axis direction is a trapezoid. Accordingly, here, the inclined surface SLB corresponds to a trapezoidal leg, and the reference surface SRB corresponds to a lower base of the trapezoid.
  • the opening 31bB is a single space.
  • the minimum value of the dimension of the opening 31bB in the YB axis direction (that is, the interval between the one ends SLaB of the inclined surface SLB) is a pair of latches when the elastic portion 52B is elastically deformed so as to compress along the YB axis direction. This is a value at which the portion 55B can be placed in the opening 31bB collectively.
  • the maximum value of the dimension of the opening 31bB in the YB-axis direction (that is, the distance between the other ends SLbB of the inclined surface SLB) is the elasticity of the elastic part 52B when the pair of locking parts 55B are disposed in the opening 31bB. Only a part of the deformation can be released (that is, the elastic portion 52B does not reach the natural length).
  • each locking portion 55B presses the inner surface of the opening 31bB by the elastic force of the elastic portion 52B, and the reaction force from the inner surface of the opening 31bB is generated by each locking portion. 55B (support portion 54B). Accordingly, the movable mirror 5B is supported on the mounting region 31B by the reaction force of the elastic force applied to each support portion 54B from the inner surface of the opening 31bB.
  • each locking portion 55B comes into contact with the inclined surface SLB of the opening 31bB. Therefore, each locking portion 55B slides on the inclined surface SLB toward the reference surface SRB by the component in the XB axis direction of the reaction force from the inclined surface SLB, and contacts the inclined surface SLB while contacting the inclined surface SLB. It is hit. Accordingly, each locking portion 55B is inscribed in a corner defined by the inclined surface SLB and the reference surface SRB, and is positioned in both the XB axis direction and the YB axis direction (self-aligned by elastic force). .
  • each locking portion 55B when viewed from the XB-axis direction, an elastic reaction force is applied to each locking portion 55B from the inner surface of the opening 31bB even at the edge of the opening 31bB.
  • a reaction force may be applied to one of the inclined surface 55aB and the inclined surface 55bB of each locking portion 55B.
  • one of the inclined surface 55aB and the inclined surface 55bB slides on the edge by the component along the inclined surface 55aB or the inclined surface 55bB of the reaction force, and both the inclined surface 55aB and the inclined surface 55bB are edges.
  • locking part 55B is latched in the said position, and the movable mirror 5B is positioned about a ZB axial direction (it is self-aligned with an elastic force). That is, in the movable mirror 5B, self-alignment is three-dimensionally performed using the elastic force of the elastic portion 52B.
  • the movable mirror 5B as described above is integrally formed by, for example, MEMS technology (patterning and etching). Accordingly, the thickness of the movable mirror 5B (the dimension in the direction intersecting the mirror surface 51aB) is constant in each part, and is, for example, about 320 ⁇ m.
  • the diameter of the mirror surface 51aB is, for example, about 1 mm.
  • the distance between the surface (inner surface) of the elastic part 52B on the mirror part 51B side and the surface (outer surface) of the mirror part 51B on the elastic part 52B side is, for example, about 200 ⁇ m.
  • the thickness of the elastic portion 52B is, for example, about 10 ⁇ m to 20 ⁇ m.
  • the fixed mirror 6B and its peripheral structure are the same as the movable mirror 5B and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 33 and 34, the fixed mirror (optical element) 6B includes a mirror part (optical part) 61B having a mirror surface (optical surface) 61aB, an elastically deformable elastic part 62B, and a mirror. It has a connecting part 63B that connects the part 61B and the elastic part 62B to each other, a pair of support parts 64B, and a handle 66B.
  • the fixed mirror 6B is mounted on the base BB in a state where the mirror surface 61aB is located on a plane intersecting (for example, orthogonal to) the main surface BsB and the mirror surface 61aB is located on the main surface BsB side of the base BB. Yes.
  • the mirror part 61B is formed in a plate shape (for example, a disk shape) having the mirror surface 61aB as a main surface.
  • a flat part 61bB having a flat surface on the ZB-axis positive direction side is provided on one edge (ZB-axis positive direction side) of the edge in the direction (ZB-axis direction) intersecting the main surface BsB.
  • the elastic part 62B is formed so as to surround the mirror part 61B while being separated from the mirror part 61B when viewed from the direction intersecting the mirror surface 61aB (YB axis direction).
  • the elastic portion 62B has an annular shape in which a part from the annular shape to the ZB-axis positive direction side is missing.
  • the connecting part 63B connects the edge part on the ZB-axis negative direction side of the mirror part 61B and the elastic part 62B to each other on the center line CLB.
  • the center line CLB is a virtual straight line that passes through the center of the mirror surface 61aB when viewed from the YB axis direction and extends in the ZB axis direction.
  • the pair of support portions 64B each have a bar shape with a rectangular cross section, and are provided to face each other in the direction along the mirror surface 61aB and the main surface BsB (XB axis direction).
  • the pair of support parts 64B are connected to the elastic part 62B on each of one side and the other side in the XB axis direction with respect to the center line CLB.
  • the pair of support portions 64B are located on the ZB-axis negative direction side with respect to the mirror portion 61B.
  • Each support portion 64B includes a locking portion 65B.
  • Each of the pair of locking portions 65B is formed to be bent in, for example, a V shape on the inner side (side approaching each other) when viewed from the YB axis direction.
  • Each locking portion 65B includes an inclined surface 65aB and an inclined surface 65bB.
  • the inclined surface 65aB and the inclined surface 65bB are surfaces opposite to the surfaces facing each other in the pair of locking portions 65B (outer surfaces).
  • the inclined surfaces 65aB are inclined so as to approach each other as they go in the negative direction of the ZB axis.
  • the inclined surfaces 65bB are inclined so as to be separated from each other in the negative direction of the ZB axis.
  • the handle 66B has a pair of displacement portions 66aB connected to both ends of the elastic portion 62B.
  • the pair of displacement portions 66aB each have a bar shape with a rectangular cross section, and are provided so as to face each other in the XB axis direction.
  • Each displacement part 66aB is extended toward the ZB-axis positive direction from the edge part of the elastic part 62B.
  • the pair of displacement portions 66aB is in the positive direction of the ZB axis when viewed from the YB axis direction (the ZB axis direction intersecting the main surface BsB and the direction perpendicular to the XB axis direction where the pair of displacement portions 66aB face each other).
  • the pair of displacement portions 66aB are positioned on the ZB axis positive direction side with respect to the mirror portion 61B, the elastic portion 62B, and the pair of support portions 64B in a state where the movable mirror 5B is mounted in the mounting region 37B.
  • the pair of support portions 64B are connected to the elastic portion 62B, and the elastic portion 62B is connected to the pair of displacement portions 66aB.
  • the pair of displacement portions 66aB is connected to the pair of support portions 64B via the elastic portion 62B. Therefore, for example, by applying a force to the pair of displacement portions 66aB so as to be displaced away from each other, the elastic portion 62B is elastically deformed so as to be compressed in the XB axial direction, and the distance between the pair of support portions 64B is increased. Can be reduced. That is, the distance between the pair of support portions 64B along the XB axis direction is variable according to the elastic deformation of the elastic portion 62B. Further, the elastic force of the elastic part 62B can be applied to the support part 64B.
  • an opening 37aB is formed in the mounting region 37B.
  • the opening 37aB penetrates the device layer 3B in the ZB axis direction. Accordingly, the opening 37aB communicates with (is led to) the main surface BsB and the surface of the device layer 3B opposite to the main surface BsB. Similar to the opening 31bB in the mounting region 31B, the opening 37aB has a columnar shape with a trapezoidal shape when viewed from the ZB axis direction.
  • the pair of support portions 64B are inserted into the opening 37aB in a state where the elastic force of the elastic portion 62B is applied.
  • the support portion 64B that is, the fixed mirror 6B
  • a part of the locking portion 65B of the support portion 64B is located in the opening 37aB.
  • the locking portion 65B is in contact with a pair of edges of the opening 37aB in the ZB axis direction (an edge on the main surface BsB side and an edge on the opposite side of the main surface BsB).
  • the inclined surface 65aB is in contact with the edge of the opening 37aB on the main surface BsB side, and the inclined surface 65bB is in contact with the edge of the opening 37aB on the opposite side of the main surface BsB. Accordingly, the locking portion 65B is locked to the mounting region 37B so as to sandwich the mounting region 37B in the ZB axial direction. As a result, the fixed mirror 6B is prevented from coming off the base BB in the ZB axis direction.
  • an opening 42B is formed in the intermediate layer 4B.
  • the opening 42B includes the opening 37aB of the mounting region 37B when viewed from the ZB axis direction, and opens on both sides of the intermediate layer 4B in the ZB axis direction.
  • An opening 22B is formed in the support layer 2B.
  • the opening 22B includes the opening 37aB of the mounting region 37B when viewed from the ZB axis direction, and opens on both sides of the support layer 2B in the ZB axis direction.
  • a continuous space S2B is constituted by a region in the opening 42B of the intermediate layer 4B and a region in the opening 22B of the support layer 2B. That is, the space S2B includes a region in the opening 42B of the intermediate layer 4B and a region in the opening 22B of the support layer 2B.
  • each locking portion 65B of the fixed mirror 6B is located in the space S2B. Specifically, a part of each locking portion 65B is located in a region in the opening 22B of the support layer 2B via a region in the opening 42B of the intermediate layer 4B. A part of each locking portion 65B protrudes from the surface on the intermediate layer 4B side in the device layer 3B into the space S2B, for example, about 100 ⁇ m.
  • the inner surface of the opening 37aB is configured similarly to the inner surface of the opening 31bB in the mounting region 31B. Therefore, when the pair of locking portions 65B are arranged in the opening 37aB, the locking portion 65B presses the inner surface of the opening 37aB by the elastic force of the elastic portion 62B, and the reaction force from the inner surface of the opening 37aB is increased by the locking portion 65B ( It will be given to support part 64B). Accordingly, the fixed mirror 6B is supported on the base BB by the reaction force of the elastic force applied to the support portion 64B from the inner surface of the opening 37aB. In particular, the fixed mirror 6B also performs three-dimensional self-alignment using the inner surface of the opening 37aB and the elastic force, as in the case of the movable mirror 5B.
  • the fixed mirror 6B as described above is also integrally formed by, for example, the MEMS technique (patterning and etching) similarly to the movable mirror 5B.
  • the dimensions of each part of the fixed mirror 6B are the same as the above-described dimensions of each part of the movable mirror 5B, for example.
  • a wafer WB made of silicon is prepared, and a resist layer RB is formed on the surface of the wafer WB.
  • the resist layer RB is patterned by etching and has a pattern corresponding to the plurality of movable mirrors 5B.
  • the resist layer RB is removed to form a plurality of movable mirrors 5B arranged in two rows.
  • the wafer WB is cut along the dancing line DLB to obtain the movable mirror 5B that is separated into individual pieces.
  • the movable mirror 5B is manufactured by the above process.
  • one movable mirror 5B is picked up by the pickup head PHB and conveyed to the work position of the next process.
  • the pickup head PHB is configured to be capable of vacuum suction, for example, and holds the movable mirror 5B by sucking the mirror portion 51B of the movable mirror 5B placed on the placement surface MFB.
  • the operation of the pickup head PHB is controlled by a control device (not shown), for example.
  • the bonder head BHB is caused to enter between the pair of displacement portions 56aB from the side opposite to the mirror portion 51B and pressed against the pair of displacement portions 56aB. Slide on the pair of displacement portions 56aB toward the mirror portion 51B side. Thereby, force is applied to the pair of displacement portions 56aB, and the pair of displacement portions 56aB are displaced in directions away from each other. Thereby, the elastic portion 52B is elastically deformed so as to extend in a direction in which the pair of displacement portions 56aB face each other, and the distance between the pair of support portions 54B is reduced.
  • a portion of the bonder head BHB that is inserted between the pair of displacement portions 56aB has a width wider than a distance between the pair of displacement portions 56aB before being displaced in a direction away from each other.
  • the operation of the bonder head BHB is controlled by the control device, for example.
  • the bonder head BHB slides on the pair of displacement portions 56aB to a position where it abuts on the flat portion 51bB provided on the mirror portion 51B.
  • the bonder head BHB is configured to be capable of vacuum suction, for example, and holds the movable mirror 5B in a state where force is applied to the pair of displacement portions 56aB by sucking the flat portion 51bB. After the bonder head BHB starts attracting the flat portion 51bB, the pickup head PHB releases the holding of the movable mirror 5B.
  • the pair of support portions 54B is inserted into the opening 31bB of the base BB (first step).
  • the first step by moving the bonder head BHB, the movable mirror 5B is conveyed to the position of the opening 31bB, and is inserted into the opening 31bB from the main surface BsB side.
  • the bonder head BHB is separated from the flat portion 51bB by performing reverse injection to the bonder head BHB.
  • the bonder head BHB is moved to the side away from the main surface BsB (ZB axis positive direction side), and is extracted from between the pair of displacement portions 56aB.
  • the force applied to the pair of displacement portions 56aB is released, and the pair of displacement portions 56aB are displaced toward each other.
  • the movable mirror 5B includes an elastic part 52B and a pair of support parts 54B whose distances can be changed according to the elastic deformation of the elastic part 52B.
  • an opening 31bB communicating with the main surface BsB is formed in the mounting region 31B of the base BB on which the movable mirror 5B is mounted.
  • the support portion 54B by inserting the support portion 54B into the opening 31bB in a state where the elastic portion 52B is elastically deformed so that the distance between the support portions 54B is reduced, and releasing a part of the elastic deformation of the elastic portion 52B, In the opening 31bB, the distance between the support portions 54B is increased, and the support portion 54B can be brought into contact with the inner surface of the opening 31bB.
  • the movable mirror 5B is supported by the reaction force applied to the support portion 54B from the inner surface of the opening 31bB.
  • the movable mirror 5B is mounted on the base BB using elastic force. Therefore, it is possible to reduce the amount of adhesive used or eliminate the need for an adhesive, and reliably move the movable mirror without considering the influence of the adhesive or the like, that is, regardless of the characteristics of the mounting region 31B. 5B can be mounted.
  • the operation and effect are described by taking the movable mirror 5B as an example, but the same operation and effect are also achieved with respect to the fixed mirror 6B.
  • the movable mirror 5B has a handle 56B used for elastically deforming the elastic portion 52B so that the distance between the pair of support portions 54B changes.
  • the handle 56B is positioned on the ZB axis positive direction side with respect to the mirror portion 51B and the pair of support portions 54B in a state where the movable mirror 5B is mounted in the mounting region 31B. Therefore, when the pair of support portions 54B is inserted into the opening 31bB in a state where the elastic portion 52B is elastically deformed using the handle 56B and the distance between the pair of support portions 54B is changed, the mirror portion 51B is operated It is hard to interfere. Therefore, the movable mirror 5B can be easily mounted on the base BB. Therefore, according to this optical module 1B, the mounting process of the optical module 1B can be facilitated.
  • the handle 56B is used to reduce the distance between the pair of support portions 54B. Thereby, the structure for easy mounting of the movable mirror 5B is suitably realizable.
  • the handle 56B has a pair of displacement portions 56aB that change the distance between the pair of support portions 54B by being displaced in directions away from each other. Thereby, the movable mirror 5B can be more easily mounted on the base BB.
  • the pair of displacement portions 56aB are arranged so as to be inclined so that the distance from each other increases toward the ZB-axis positive direction side when viewed from the XB-axis direction.
  • the bonder head BHB entered between the pair of displacement portions 56aB from the ZB axis positive direction side is pressed against the pair of displacement portions 56aB, and slides on the pair of displacement portions 56aB toward the ZB axis negative direction side.
  • the pair of displacement portions 56aB can be displaced in directions away from each other. Therefore, the mounting process of the optical module 1B can be further facilitated.
  • the handle 56B is positioned on the ZB axis positive direction side with respect to the elastic portion 52B in a state where the movable mirror 5B is mounted in the mounting region 31B. Accordingly, when the pair of support portions 54B is inserted into the opening 31bB in a state in which the elastic portion 52B is elastically deformed using the handle 56B and the distance between the pair of support portions 54B is changed, It is hard to interfere. Therefore, the movable mirror 5B can be more easily mounted on the base BB.
  • the base BB includes the support layer 2B and the device layer 3B provided on the support layer 2B and including the main surface BsB and the mounting region 31B. Further, the opening 31bB penetrates the device layer 3B in the ZB axis direction. And the support part 54B contains the latching
  • the movable mirror 5B, the fixed mirror 6B, and the beam splitter 7B are arranged so as to constitute the interference optical system 10B. Thereby, FTIR with improved sensitivity can be obtained.
  • the support layer 2B is the first silicon layer of the SOI substrate
  • the device layer 3B is the second silicon layer of the SOI substrate
  • the intermediate layer 4B is the insulating layer of the SOI substrate.
  • the light incident part 8B is arranged so that the measurement light is incident on the interference optical system 10B from the outside, and the light emitting part 9B emits the measurement light to the outside from the interference optical system 10B.
  • the light emitting part 9B emits the measurement light to the outside from the interference optical system 10B.
  • the movable mirror 5B is mounted on the base BB using the elastic force of the elastic portion 52B.
  • the mirror 5B can be mounted. Further, in a state where the distance between the pair of support portions 54B is changed by applying a force to the handle 56B, the pair of support portions 54B is inserted into the opening 31bB.
  • the handle 56B is provided so as to be positioned on the ZB-axis positive direction side with respect to the mirror portion 51B and the pair of support portions 54B in a state where the movable mirror 5B is mounted in the mounting region 31B, the mirror The part 51B is unlikely to obstruct work. Therefore, in a state where the distance between the pair of support portions 54B is changed, the pair of support portions 54B can be easily inserted into the opening 31bB. Therefore, according to the mounting method of the optical module 1B, the mounting process of the optical module 1B is facilitated. Furthermore, as described above, mounting by an automatic machine (pickup head PHB and bonder head BHB) is possible, and the mounting process can be automated. [Modification]
  • the connecting portion 53B extends along the direction (YB axis direction) in which the pair of displacement portions 56aB face each other, and one side of the mirror portion 51B in the YB axis direction.
  • the edge portion and the elastic portion 52B may be connected to each other.
  • the elastic portion 52B may have an annular shape in which a part on the ZB-axis negative direction side is missing from the annular shape.
  • the connecting portion 53B connects the edge portion on the ZB axis positive direction side of the mirror portion 51B and the elastic portion 52B.
  • a pair of support portions 54B are connected to both ends of the elastic portion 52B.
  • Each displacement part 56aB is extended toward the ZB-axis positive direction from the intermediate part of the elastic part 52B. Even with such a modification, the movable mirror 5B can be reliably mounted regardless of the characteristics of the mounting region 31B, and the mounting process of the optical module 1B can be facilitated, as in the above embodiment.
  • the reaction force from the inner surface of the opening 31bB is applied to the pair of support portions 54B toward the inner side (side closer to each other).
  • a reaction force from the inner surface of the opening 31bB may be applied to the pair of support portions 54B toward the outside (sides away from each other).
  • a pair of openings 31bB are formed in the mounting region 31B of the base BB.
  • Each of the pair of locking portions 55AB is formed to be bent outwardly (sides away from each other) in a V shape when viewed from the XB axis direction.
  • the inclined surfaces 55aB are inclined so as to be separated from each other in the ZB-axis negative direction.
  • the inclined surfaces 55bB are inclined so as to approach each other in the negative direction of the ZB axis.
  • the pair of locking portions 55AB are inserted into the pair of openings 31bB, respectively.
  • each support portion 54B further includes a leg portion 57B extending along the ZB axis direction.
  • the pair of leg portions 57B is provided so as to sandwich the mirror portion 51B in the YB axis direction, and is connected to the displacement portion 56AaB and the locking portion 55B.
  • Each displacement part 56AaB extends along the ZB axis direction so as to be positioned on the same straight line as the leg part 57B.
  • the elastic part 52B includes a pair of elastic parts 52aB and 52bB. Each elastic part 52aB, 52bB has a semi-annular shape, for example.
  • the elastic portion 52aB connects the pair of displacement portions 56AaB to each other, and the elastic portion 52bB connects the pair of leg portions 57B to each other.
  • the elastic portion 52aB is located on the ZB axis positive direction side with respect to the pair of displacement portions 56AaB.
  • the elastic part 52B includes only the elastic part 52aB and does not include the elastic part 52bB.
  • the connecting portion 53B extends along the YB axis direction, and connects the edge portion on one side of the mirror portion 51B in the YB axis direction and the leg portion 57B. According to these modified examples, similarly to the above embodiment, the movable mirror 5B can be reliably mounted regardless of the characteristics of the mounting region 31B, and the mounting process of the optical module 1B can be facilitated.
  • a part of the mirror surface 51aB may be arranged inside the base BB.
  • the mirror surface 51aB intersects the mounting area 31B, and the entire movable mirror 5AB penetrates the mounting area 31B through the opening 31bB.
  • a pair of support portions 54B are provided so as to sandwich the mirror portion 51B and the elastic portion 52B in the YB axis direction, and are connected to the elastic portion 52B at the bent portion of the locking portion 55B.
  • the portion that faces the mirror surface 51aB is cut out to allow the measurement light L0B to pass therethrough.
  • the distance between the pair of support portions 54B is reduced by the pair of displacement portions 56aB being displaced in a direction approaching each other. Even with such a modification, the movable mirror 5B can be reliably mounted regardless of the characteristics of the mounting region 31B, and the mounting process of the optical module 1B can be facilitated, as in the above embodiment.
  • the movable mirror 5EB may be configured as shown in FIG.
  • the distance between the pair of support portions 54B is increased by the pair of displacement portions 56AaB of the handle 56AB being displaced in directions away from each other.
  • the opening 31bB is configured in the same manner as in FIG. In a state where the movable mirror 5EB is mounted on the base BB, a reaction force from the inner surface of the opening 31bB is applied to the pair of support portions 54B toward the outside (sides away from each other).
  • the movable mirror 5EB When the movable mirror 5EB is mounted, for example, in a state where the distance between the pair of support portions 54B is increased by displacing the pair of displacement portions 56AaB away from each other by the tweezers TB (a pair of tip portions of the tweezers TB).
  • the pair of locking portions 55B are inserted into the pair of openings 31bB, respectively. Even with such a modification, the movable mirror 5B can be reliably mounted regardless of the characteristics of the mounting region 31B, and the mounting process of the optical module 1B can be facilitated, as in the above embodiment.
  • the pair of displacement portions 56aB are disposed so as to be inclined so that the distance from each other increases toward the ZB axis positive direction side when viewed from the XB axis direction.
  • the displacement portions 56aB may extend along the ZB axis direction in parallel with each other.
  • a pair of inclined surfaces may be provided at the distal end portion of the bonder head BHB so that the distance from each other increases as the distance from the distal end portion increases.
  • the distance between the inclined surfaces at the tip may be narrower than the distance between the pair of displacement portions 56aB.
  • the bonder head BHB by causing the bonder head BHB to enter between the pair of displacement portions 56aB from the tip end side, press against the pair of displacement portions 56aB, and slide on the pair of displacement portions 56aB toward the mirror portion 51B side.
  • the pair of displacement portions 56aB can be displaced in directions away from each other.
  • the fixed mirror 6B is mounted on the device layer 3B, but the fixed mirror 6B may be mounted on the support layer 2B.
  • the beam splitter 7B is mounted on the support layer 2B.
  • the beam splitter 7B may be mounted on the device layer 3B.
  • the beam splitter 7B is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1B may include a light emitting element that generates measurement light incident on the light incident portion 8B in addition to the light incident portion 8B.
  • the optical module 1B may include a light emitting element that generates measurement light incident on the interference optical system 10B, instead of the light incident portion 8B.
  • the optical module 1B may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9B in addition to the light emitting unit 9B.
  • the optical module 1B may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10B, instead of the light emitting unit 9B.
  • first through electrode electrically connected to each actuator region 33B and the second through electrode electrically connected to each of both end portions 34aB of each elastic support region 34B are the support layer 2B and the intermediate layer 4B. (Only the support layer 2B when the intermediate layer 4B is not present) is provided, and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31B is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1B is not limited to what constitutes FTIR, and may constitute another optical system.
  • the movable mirror and the fixed mirror were illustrated as an optical element mounted in base BB.
  • the optical surface is a mirror surface.
  • the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter. The above second embodiment will be additionally described below.
  • the optical element is An optical unit having an optical surface; An elastic part capable of elastic deformation; A pair of support portions provided so as to be opposed to each other, to which an elastic force is applied according to the elastic deformation of the elastic portion and the distance between them is variable; A handle used to elastically deform the elastic portion so that the distance between the pair of support portions changes,
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface; The pair of support portions are inserted into the openings in a state where the elastic force of the elastic portion is applied, The optical element is supported by the mounting region by a reaction force of the elastic force applied from the inner surface of the opening,
  • the handle is an optical module that is positioned on one side in a direction intersecting the main surface with respect to the optical unit and the pair of support units in a state where the optical element is mounted in the mounting region.
  • the pair of displacement portions are located on the one side in a direction intersecting the main surface when viewed from a direction perpendicular to both the direction intersecting the main surface and the direction in which the pair of displacement portions face each other.
  • the optical module according to appendix 13 wherein the optical module is arranged so as to be inclined so that a distance from each other increases.
  • the base includes a support layer, and a device layer provided on the support layer and including the main surface and the mounting region, The opening passes through the device layer in a direction intersecting the main surface,
  • the optical module according to any one of appendices 10 to 16, wherein the support portion includes a locking portion that is bent so as to contact a pair of edges of the opening in a direction intersecting the main surface.
  • Appendix 18 A fixed mirror mounted on at least one of the support layer, the device layer, and an intermediate layer provided between the support layer and the device layer; A beam splitter mounted on at least one of the support layer, the device layer, and the intermediate layer, and The optical element is a movable mirror including the optical surface which is a mirror surface; The device layer has a drive region connected to the mounting region, The optical module according to appendix 17, wherein the movable mirror, the fixed mirror, and the beam splitter are arranged so as to constitute an interference optical system.
  • the base has an intermediate layer provided between the support layer and the device layer;
  • the support layer is a first silicon layer of an SOI substrate;
  • the device layer is a second silicon layer of the SOI substrate;
  • the optical module according to appendix 18, wherein the intermediate layer is an insulating layer of the SOI substrate.
  • a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
  • An optical module mounting method according to any one of appendices 10 to 20, comprising: A first step of inserting the pair of support portions into the opening in a state where the distance between the pair of support portions is changed by applying a force to the handle; A second step of releasing the force applied to the handle to bring the pair of support portions into contact with the inner surface of the opening and fixing the optical element to the base.
  • Implementation method [Third Embodiment]
  • An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, JP 2012-524295 A).
  • MEMS Micro Electro Mechanical Systems
  • Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.
  • US Patent Application Publication No. 2002/0186477 describes an optical system manufacturing process.
  • a template substrate and an optical bench are prepared.
  • An alignment slot is formed on the template substrate by etching.
  • Bond pads are arranged on the main surface of the optical bench.
  • the template substrate is attached to the main surface of the optical bench so that the alignment slot is disposed on the bond pad.
  • the optical element is inserted into the alignment slot while being positioned using the side wall of the alignment slot, and is positioned on the bond pad. Then, the optical element is bonded to the optical bench by reflowing the bond pad.
  • the optical module as described above has the following problems in that, for example, the size of the movable mirror depends on the achievement level of deep processing on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 ⁇ m at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.
  • Another object of the present disclosure is to provide an optical module capable of stably mounting an optical element regardless of the characteristics of the mounting region.
  • An optical module is an optical module including an optical element and a base on which the optical element is mounted.
  • the optical element includes an optical unit having an optical surface, one end, and the other end.
  • An elastic part provided around the optical part, a pair of support parts extending from the one end part and the other end part to the base side of the optical part, and one of the support parts and the optical part are connected to each other
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface, and the support portion is given an elastic force according to elastic deformation of the elastic portion.
  • the distance between each other is variable and is inserted into the opening in a state where the elastic force is applied, and the optical element is applied to the support portion from the inner surface of the opening in a state where the optical surface intersects the main surface.
  • the connecting part It Supported by the mounting area by the reaction force of the elastic force, the connecting part It is provided on the base side than the center of the optical surface.
  • the optical element has an elastic part and a pair of support parts whose distances can be changed according to the elastic deformation of the elastic part.
  • an opening communicating with the main surface is formed in the mounting region of the base on which the optical element is mounted. Therefore, as an example, the support portion is inserted into the opening in a state in which the elastic portion is elastically deformed so that the distance between the support portions is reduced, and a part of the elastic deformation of the elastic portion is released, so that the support portion is opened in the opening. The distance between each other increases, and the support portion can be brought into contact with the inner surface of the opening. Thereby, an optical element is supported by the reaction force provided to a support part from the inner surface of opening. As described above, in this optical module, the optical element is mounted on the base using the elastic force. Therefore, it is possible to mount the optical element without considering the adverse effect of the adhesive, that is, without depending on the characteristics of the mounting region.
  • a connecting portion that connects the optical portion and the support portion to each other is provided on the base side from the center of the optical surface. For this reason, for example, the center of gravity of the optical element as a whole is closer to the base than in the case where the connecting portion is provided on the opposite side of the base from the center of the optical surface. For this reason, stability improves.
  • an elastic part can be provided around the optical part in the entire region opposite to the base from the center of the optical surface.
  • the elastic portion can be made relatively long, and the spring constant can be easily adjusted.
  • the optical element can be stably mounted regardless of the characteristics of the mounting region.
  • the elastic portion can be provided around the optical portion in the entire region opposite to the base from the center of the optical surface. For this reason, even if it is a case where an elastic part is provided so that it may adjoin to an optical part, the length of an elastic part is securable enough. That is, according to this optical element, it is possible to realize a compact optical element while ensuring the length of the elastic portion.
  • the elastic portion includes an arc-shaped portion formed so as to partially surround the optical portion when viewed from the direction intersecting the optical surface, and includes one end portion and the other. The end may be provided at the tip of the arcuate portion.
  • the support portion includes a locking portion that extends to the base side beyond the connection position of the optical portion by the connection portion and is inserted into the opening, and is provided on the optical surface.
  • the thickness of the locking portion may be larger than the thickness of the elastic portion when viewed from the intersecting direction. In this case, the optical element can be supported on the base more stably via the locking portion.
  • the thickness of the support portion may be larger than the thickness of the elastic portion when viewed from the direction intersecting the optical surface. In this case, the force for elastically deforming the elastic part can be stably applied to the elastic part via the support part.
  • the thickness of the connecting portion may be larger than the thickness of the elastic portion when viewed from the direction intersecting the optical surface. In this case, the support portion and the optical portion can be reliably connected.
  • the inner surface of the opening is a pair of inclined surfaces that are inclined so that the distance from each other increases from one end to the other when viewed from the direction intersecting the main surface. And a reference plane extending along a reference line connecting the other end of the one inclined surface and the other end of the other inclined surface.
  • An optical module further includes a fixed mirror and a beam splitter mounted on a base, the optical element is a movable mirror including an optical surface that is a mirror surface, and the base is mounted.
  • the movable mirror, the fixed mirror, and the beam splitter may be arranged so as to constitute an interference optical system.
  • an FTIR with improved sensitivity can be obtained.
  • the mounting area where the movable mirror is mounted has a characteristic of being connected to the driving area and driven. Therefore, the above configuration is more effective because it is easily affected by the adverse effects of the adhesive.
  • the base includes a support layer, a device layer provided on the support layer, and an intermediate layer provided between the support layer and the device layer.
  • the support layer may be a first silicon layer of the SOI substrate
  • the device layer may be a second silicon layer of the SOI substrate
  • the intermediate layer may be an insulating layer of the SOI substrate.
  • An optical module is disposed so that the measurement light is incident on the interference optical system from the outside and the measurement light is emitted from the interference optical system to the outside.
  • a light emitting part In this case, an FTIR including a light incident part and a light emission part can be obtained.
  • an optical module capable of stably mounting an optical element regardless of the characteristics of the mounting region.
  • the optical module 1C includes a base BC.
  • the base BC has a main surface BsC.
  • the base BC includes a support layer 2C, a device layer 3C provided on the support layer 2C, and an intermediate layer 4C provided between the support layer 2C and the device layer 3C.
  • the main surface BsC is a surface of the device layer 3C opposite to the support layer 2C.
  • the support layer 2C, the device layer 3C, and the intermediate layer 4C are configured by an SOI substrate.
  • the support layer 2C is the first silicon layer of the SOI substrate.
  • the device layer 3C is a second silicon layer of the SOI substrate.
  • the intermediate layer 4C is an insulating layer of the SOI substrate.
  • the support layer 2C, the device layer 3C, and the intermediate layer 4C have a rectangular shape with, for example, a side of about 10 mm when viewed from the ZC axis direction (a direction parallel to the ZC axis) that is the stacking direction thereof.
  • Each thickness of the support layer 2C and the device layer 3C is, for example, about several hundred ⁇ m.
  • the thickness of the intermediate layer 4C is, for example, about several ⁇ m.
  • FIG. 46 the device layer 3C and the intermediate layer 4C are shown with one corner of the device layer 3C and one corner of the intermediate layer 4C cut away.
  • the device layer 3C has a mounting area 31C and a drive area 32C connected to the mounting area 31C.
  • the drive region 32C includes a pair of actuator regions 33C and a pair of elastic support regions 34C.
  • the mounting region 31C and the drive region 32C (that is, the mounting region 31C and the pair of actuator regions 33C and the pair of elastic support regions 34C) are integrally formed on a part of the device layer 3C by MEMS technology (patterning and etching). Yes.
  • the pair of actuator regions 33C are disposed on both sides of the mounting region 31C in the XC axis direction (direction parallel to the XC axis orthogonal to the ZC axis). That is, the mounting region 31C is sandwiched between the pair of actuator regions 33C in the XC axis direction.
  • Each actuator region 33C is fixed to the support layer 2C via the intermediate layer 4C.
  • a first comb tooth portion 33aC is provided on the side surface of each actuator region 33C on the mounting region 31C side.
  • Each first comb tooth portion 33aC is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the first comb tooth portion 33aC.
  • Each actuator region 33C is provided with a first electrode 35C.
  • the pair of elastic support regions 34C are disposed on both sides of the mounting region 31C in the YC axis direction (a direction parallel to the YC axis perpendicular to the ZC axis and the XC axis). That is, the mounting region 31C is sandwiched between the pair of elastic support regions 34C in the YC axis direction. Both end portions 34aC of each elastic support region 34C are fixed to the support layer 2C via the intermediate layer 4C.
  • Each elastic support region 34C has an elastic deformation portion 34bC (a portion between both end portions 34aC) having a structure in which a plurality of leaf springs are connected.
  • each elastic support region 34C is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the elastic deformation portion 34bC.
  • a second electrode 36C is provided at each of both end portions 34aC.
  • each elastic support region 34C is connected to the mounting region 31C.
  • the mounting region 31C is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the mounting region 31C. That is, the mounting region 31C is supported by the pair of elastic support regions 34C.
  • a second comb tooth portion 31aC is provided on the side surface of each mounting region 31C on the side of each actuator region 33C.
  • Each second comb tooth portion 31aC is in a state of floating with respect to the support layer 2C by removing the intermediate layer 4C immediately below the second comb tooth portion 31aC.
  • each comb tooth of the first comb tooth portion 33aC is located between each comb tooth of the second comb tooth portion 31aC.
  • the pair of elastic support regions 34C sandwich the mounting region 31C from both sides when viewed in the direction AC parallel to the XC axis, and the mounting region 31C is mounted so that the mounting region 31C returns to the initial position when the mounting region 31C moves along the direction AC.
  • An elastic force is applied to the region 31C. Therefore, when a voltage is applied between the first electrode 35C and the second electrode 36C and an electrostatic attractive force acts between the first comb tooth portion 33aC and the second comb tooth portion 31aC facing each other, the electrostatic attractive force
  • the mounting region 31C is moved along the direction AC to a position where the elastic force generated by the pair of elastic support regions 34C is balanced.
  • the drive region 32C functions as an electrostatic actuator.
  • the optical module 1C further includes a movable mirror 5C, a fixed mirror 6C, a beam splitter 7C, a light incident part 8C, and a light emitting part 9C.
  • the movable mirror 5C, the fixed mirror 6C, and the beam splitter 7C are arranged on the device layer 3C so as to constitute an interference optical system 10C that is a Michelson interference optical system.
  • the movable mirror 5C is mounted on the mounting region 31C of the device layer 3C on one side of the beam splitter 7C in the XC axis direction.
  • the mirror surface 51aC of the mirror part 51C included in the movable mirror 5C is located on the opposite side of the support layer 2C with respect to the device layer 3C.
  • the mirror surface 51aC is, for example, a surface perpendicular to the XC axis direction (that is, a surface perpendicular to the direction AC) and faces the beam splitter 7C side.
  • the fixed mirror 6C is mounted on the mounting region 37C of the device layer 3C on one side of the beam splitter 7C in the YC axis direction.
  • the mirror surface 61aC of the mirror portion 61C of the fixed mirror 6C is located on the opposite side of the support layer 2C with respect to the device layer 3C.
  • the mirror surface 61aC is, for example, a surface perpendicular to the YC axis direction and faces the beam splitter 7C side.
  • the light incident portion 8C is mounted on the device layer 3C on the other side of the beam splitter 7C in the YC axis direction.
  • the light incident part 8C is configured by, for example, an optical fiber and a collimating lens.
  • the light incident part 8C is arranged so that the measurement light is incident on the interference optical system 10C from the outside.
  • the light emitting portion 9C is mounted on the device layer 3C on the other side of the beam splitter 7C in the XC axis direction.
  • the light emitting portion 9C is configured by, for example, an optical fiber and a collimating lens.
  • the light emitting unit 9C is arranged to emit measurement light (interference light) from the interference optical system 10C to the outside.
  • the beam splitter 7C is a cube type beam splitter having an optical functional surface 7aC.
  • the optical functional surface 7aC is located on the side opposite to the support layer 2C with respect to the device layer 3C.
  • the beam splitter 7C is positioned by bringing one corner on the bottom side of the beam splitter 7C into contact with one corner of the rectangular opening 3aC formed in the device layer 3C.
  • the beam splitter 7C is mounted on the support layer 2C by being fixed to the support layer 2C by bonding or the like in a positioned state.
  • the optical module 1C configured as described above, when the measurement light L0C is incident on the interference optical system 10C from the outside via the light incident portion 8C, a part of the measurement light L0C is transmitted to the optical functional surface 7aC of the beam splitter 7C.
  • the reflected light travels toward the movable mirror 5C, and the remaining portion of the measurement light L0C passes through the optical function surface 7aC of the beam splitter 7C and travels toward the fixed mirror 6C.
  • a part of the measurement light L0C is reflected by the mirror surface 51aC of the movable mirror 5C, travels toward the beam splitter 7C on the same optical path, and passes through the optical function surface 7aC of the beam splitter 7C.
  • the remaining part of the measurement light L0C is reflected by the mirror surface 61aC of the fixed mirror 6C, travels on the same optical path toward the beam splitter 7C, and is reflected by the optical function surface 7aC of the beam splitter 7C.
  • a part of the measurement light L0C transmitted through the optical functional surface 7aC of the beam splitter 7C and the remaining part of the measurement light L0C reflected by the optical functional surface 7aC of the beam splitter 7C become the measurement light L1C that is interference light, and the measurement light L1C is emitted to the outside from the interference optical system 10C via the light emitting portion 9C.
  • the optical module 1C since the movable mirror 5C can be reciprocated at high speed along the direction AC, a small and highly accurate FTIR can be provided. [Movable mirror and surrounding structure]
  • the movable mirror (optical element) 5C includes a mirror part (optical part) 51C having a mirror surface (optical surface) 51aC, an elastic part 52C, and a pair of supports. 56C, and a single connecting portion 57C that connects the one supporting portion 56C and the mirror portion 51C to each other.
  • the mirror part 51C is formed in a disk shape.
  • the mirror surface 51aC is a circular plate surface of the mirror part 51C.
  • the movable mirror 5C is mounted on the base BC in a state where the mirror surface 51aC intersects (for example, is orthogonal to) the main surface BsC.
  • the elastic part 52C is provided around the mirror part 51C.
  • the elastic part 52C is provided around the mirror part 51C so as to surround the entire mirror part 51C on the opposite side of the main surface BsC of the base BC from the center of the mirror part 51C in the ZC axis direction.
  • the elastic part 52C is separated from the mirror part 51C.
  • the elastic portion 52C includes an arc-shaped portion 52aC formed in an arc shape so as to partially surround the mirror portion 51C when viewed from the direction intersecting the mirror surface 51aC (XC axis direction).
  • 52 C of elastic parts are comprised as a leaf
  • the arc-shaped portion 52aC is disposed on the opposite side of the main surface BsC of the base BC from the center line CLC passing through the center of the mirror portion 51C in the ZC axis direction.
  • the center line CLC is a virtual straight line extending along the direction (YC axis direction) along the mirror surface 51aC and the main surface BsC.
  • the elastic portion 52C includes one end 52pC and the other end 52rC provided at both ends of the arc-shaped portion 52aC.
  • the one end portion 52pC and the other end portion 52rC may be curved or continuous from the arcuate portion 52aC.
  • the one end 52pC and the other end 52rC overlap with, for example, the center line CLC.
  • the elastic part 52C is configured symmetrically with respect to another center line DLC passing through the center of the mirror part 51C in the YC axis direction.
  • the center line DLC is a virtual line that intersects (orthogonally) the center line CLC and extends along the ZC axis direction.
  • the support portion 56C is a rod having a rectangular cross section as an example, and is provided so as to sandwich at least a part of the mirror part 51C (a part on the main surface BsC side of the base BC) in the YC axis direction.
  • the support portion 56C is connected to each of the one end portion 52pC and the other end portion 52rC of the elastic portion 52C (formed in a continuous manner).
  • the support part 56C extends from the one end part 52pC and the other end part 52rC to the base BC side from the mirror part 51C. More specifically, the support portion 56C includes an inclined portion 56aC that is inclined so that the distance from each other approaches the base BC from the one end portion 52pC and the other end portion 52rC.
  • the support portion 56C includes a locking portion 55C extending from the end portion on the opposite side to the one end portion 52pC and the other end portion 52rC in the inclined portion 56aC.
  • the support portion 56C includes a protruding portion 56cC that protrudes from the inclined portion 56aC in a direction opposite to each other between the pair of support portions 56C.
  • a corner portion 56pC is formed by the inclined portion 56aC, the locking portion 55C, and the projecting portion 56cC. Between the pair of support portions 56C, the corner portions 56pC face opposite to each other.
  • the support portion 56C can be elastically deformed so as to compress the elastic portion 52C in the YC axis direction by applying a force to the support portion 56C so as to sandwich the support portion 56C from both sides in the YC axis direction. That is, the mutual distance between the support portions 56C along the YC axis direction is variable according to the elastic deformation of the elastic portion 52C. Further, the elastic force of the elastic portion 52C can be applied to the support portion 56C. In addition, when giving the force for deforming the elastic part 52C to the support part 56C, the protrusion part 56cC can be utilized, for example (namely, force can be input from the protrusion part 56cC).
  • the connecting portion 57C is provided on one of the pair of support portions 56C, and connects the support portion 56C and the mirror portion 51C to each other.
  • the connecting portion 57C is connected to the inclined portion 56aC of the support portion 56C.
  • the connecting portion 57C is connected to the mirror portion 51C at a position opposite to the base BC with respect to the connecting position with the inclined portion 56aC. Accordingly, the connecting portion 57C is inclined (inclined) so as to approach the base BC from the one supporting portion 56C where the connecting portion 57C is not provided toward the other supporting portion 56C.
  • the connecting portion 57C is provided closer to the base BC than the center of the mirror surface 51aC. Therefore, the pair of support portions 56C extend to the base BC side beyond the connection position CPC with the mirror portion 51C by the connection portion 57C.
  • the locking portion 55C is inserted into an opening 31bC described later.
  • the locking portion 55C is bent in a V shape as a whole.
  • the locking portion 55C includes an inclined surface 55aC and an inclined surface 55bC.
  • the inclined surface 55aC and the inclined surface 55bC are surfaces on the opposite side of the surfaces facing each other in the pair of locking portions 55C (outer surfaces).
  • the inclined surfaces 55aC are inclined so as to approach each other in the direction away from the connecting portion 57C (ZC axis negative direction) between the pair of locking portions 55C.
  • the inclined surfaces 55bC are inclined so as to be separated from each other in the negative direction of the ZC axis.
  • the absolute value of the inclination angle of the inclined surface 55aC with respect to the ZC axis is less than 90 °.
  • the absolute value of the inclination angle of the inclined surface 55bC is less than 90 °.
  • the absolute values of the inclination angles are equal to each other.
  • an opening 31bC is formed in the mounting region 31C.
  • the opening 31bC extends in the ZC axis direction and penetrates the device layer 3C. Therefore, the opening 31bC communicates with (is led to) the main surface BsC and the surface of the device layer 3C opposite to the main surface BsC.
  • the opening 31bC has a columnar shape that is trapezoidal when viewed from the ZC axis direction (see FIG. 49). Details of the opening 31bC will be described later.
  • the support portion 56C is inserted into the opening 31bC in a state where the elastic force of the elastic portion 52C is applied.
  • the support portion 56C that is, the movable mirror 5C
  • a part of the locking portion 55C of the support portion 56C is located in the opening 31bC.
  • the locking portion 55C is in contact with a pair of edges (the edge on the main surface BsC side and the edge on the opposite side of the main surface BsC) of the opening 31bC in the ZC axis direction.
  • the inclined surface 55aC is in contact with the edge of the opening 31bC on the main surface BsC side, and the inclined surface 55bC is in contact with the edge of the opening 31bC on the opposite side of the main surface BsC. Accordingly, the locking portion 55C is locked to the mounting region 31C so as to sandwich the mounting region 31C in the ZC axial direction. As a result, the movable mirror 5C is prevented from coming off the base BC in the ZC axis direction.
  • an opening 41C is formed in the intermediate layer 4C.
  • the openings 41C are opened on both sides of the intermediate layer 4C in the ZC axis direction.
  • An opening 21C is formed in the support layer 2C.
  • the openings 21C are opened on both sides of the support layer 2C in the ZC axis direction.
  • a continuous space S1C is formed by the region in the opening 41C of the intermediate layer 4C and the region in the opening 21C of the support layer 2C. That is, the space S1C includes a region in the opening 41C of the intermediate layer 4C and a region in the opening 21C of the support layer 2C.
  • the space S1C is formed between the support layer 2C and the device layer 3C, and corresponds to at least the mounting region 31C and the drive region 32C.
  • the region in the opening 41C of the intermediate layer 4C and the region in the opening 21C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • the region in the opening 41C of the intermediate layer 4C is a portion that should be separated from the support layer 2C in the mounting region 31C and the drive region 32C (that is, a portion that should be in a floating state with respect to the support layer 2C.
  • a gap for separating the entire mounting region 31C, the elastic deformation portion 34bC, the first comb tooth portion 33aC, and the second comb tooth portion 31aC) of each elastic support region 34C from the support layer 2C is formed.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a reference surface SRC.
  • the inclined surface SLC includes one end SLaC and the other end SLbC.
  • One end SLaC and the other end SLbC are both ends of the inclined surface SLC when viewed from the ZC axis direction.
  • the pair of inclined surfaces SLC are inclined (for example, with respect to the XC axis) such that the distance from one end SLaC to the other end SLbC increases.
  • the reference surface SRC extends along a reference line BLC that connects the other end SLbC of one inclined surface SLC and the other end SLbC of the other inclined surface SLC, as viewed from the ZC axis direction.
  • the reference surface SRC simply connects the other ends SLbC to each other.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a trapezoid. Therefore, here, the inclined surface SLC corresponds to a trapezoidal leg, and the reference surface SRC corresponds to the lower base of the trapezoid.
  • the opening 31bC is a single space.
  • the minimum value of the dimension of the opening 31bC in the YC axis direction (that is, the distance between the one ends SLaC of the inclined surface SLC) is a pair of locking when the elastic portion 52C is elastically deformed along the YC axis direction. The value is such that the portion 55C can be placed in the opening 31bC in a lump.
  • the maximum value of the dimension of the opening 31bC in the YC-axis direction (that is, the interval between the other ends SLbC of the inclined surface SLC) is the elasticity of the elastic part 52C when the pair of locking parts 55C is disposed in the opening 31bC. Only a part of the deformation can be released (that is, the elastic portion 52C does not reach the natural length).
  • the locking portion 55C presses the inner surface of the opening 31bC by the elastic force of the elastic portion 52C, and the reaction force from the inner surface of the opening 31bC is increased by the locking portion 55C (
  • the support portion 56C) is provided. Accordingly, the movable mirror 5C is supported by the mounting region 31C by the reaction force of the elastic force applied from the inner surface of the opening 31bC to the support portion 56C in a state where the mirror surface 51aC intersects (for example, orthogonally) the main surface BsC. .
  • the locking portion 55C is brought into contact with the inclined surface SLC of the opening 31bC. For this reason, the locking portion 55C slides on the inclined surface SLC toward the reference surface SRC by the component in the XC axis direction of the reaction force from the inclined surface SLC, and pushes against the reference surface SRC while contacting the inclined surface SLC. Hit. Accordingly, the locking portion 55C is inscribed in the corner defined by the inclined surface SLC and the reference surface SRC, and is positioned in both the XC axis direction and the YC axis direction (self-aligned by elastic force).
  • the cross-sectional shape of the locking portion 55C is a quadrangle, when viewed from the ZC axial direction, the inclined surface SLC contacts the locking portion 55C at a point, and the reference surface SRC is in contact with the locking portion 55C. Touch with a line. That is, here, the inner surface of the opening 31bC contacts the pair of locking portions 55C at two points and two lines when viewed from the ZC axial direction.
  • the locking portion 55C when viewed from the XC axial direction, the locking portion 55C is applied with a reaction force of elastic force from the inner surface of the opening 31bC even at the edge of the opening 31bC.
  • a reaction force may be applied to one of the inclined surface 55aC and the inclined surface 55bC of the locking portion 55C.
  • one of the inclined surface 55aC and the inclined surface 55bC slides on the edge by the component of the reaction force along the inclined surface 55aC or the inclined surface 55bC, and both the inclined surface 55aC and the inclined surface 55bC are edges.
  • the locking portion 55C is locked at the position, and the movable mirror 5C is positioned in the ZC axial direction (self-aligned by the elastic force). That is, in the movable mirror 5C, self-alignment is three-dimensionally performed using the elastic force of the elastic portion 52C.
  • the movable mirror 5C as described above is integrally formed by, for example, MEMS technology (patterning and etching). Accordingly, the thickness of the movable mirror 5C (the dimension in the direction intersecting the mirror surface 51aC) is constant in each part, and is, for example, about 320 ⁇ m.
  • the diameter of the mirror surface 51aC is, for example, about 1 mm.
  • the distance between the surface (inner surface) of the elastic part 52C on the mirror part 51C side and the surface (outer surface) of the mirror part 51C on the elastic part 52C side is, for example, about 200 ⁇ m.
  • the thickness of the elastic portion 52C is, for example, about 10 ⁇ m to 20 ⁇ m.
  • the thickness of the locking portion 55C is larger than the thickness (plate thickness) of the elastic portion 52C when viewed from the direction intersecting the mirror surface 51aC (XC axis direction). Further, when viewed from the XC axis direction, the overall thickness of the support portion 56C is larger than the thickness of the elastic portion 52C. Furthermore, when viewed from the XC axis direction, the thickness of the connecting portion 57C is larger than the thickness of the elastic portion 52C. That is, here, the elastic portion 52C is the thinnest (thinner) among the elastic portion 52C, the support portion 56C, and the connecting portion 57C.
  • the support portion 56C and the connecting portion 57C are not substantially deformed.
  • the support part 56C and the connection part 57C may be slightly deformed.
  • the support portion 56C and the connection portion 57C may be deformed in a range in which the deformation amount of the support portion 56C and the connection portion 57C is smaller than the deformation amount of the elastic portion 52C (note that the support portion 56C and the connection portion 57C).
  • the amount of deformation may be zero).
  • the fixed mirror 6C and its peripheral structure are the same as the movable mirror 5C and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 50 and 51, the fixed mirror (optical element) 6C includes a mirror part (optical part) 61C having a mirror surface (optical surface) 61aC, an elastic part 62C, and a pair of support parts 66C. And a single connecting portion 67C that connects the one supporting portion 66C and the mirror portion 61C to each other.
  • the mirror part 61C is formed in a disk shape.
  • the mirror surface 61aC is a circular plate surface of the mirror portion 61C.
  • the fixed mirror 6C is mounted on the base BC in a state where the mirror surface 61aC intersects (for example, is orthogonal to) the main surface BsC.
  • the elastic part 62C is provided around the mirror part 61C.
  • the elastic portion 62C is provided around the mirror portion 61C so as to surround the entire portion of the base BC opposite to the main surface BsC from the center of the mirror portion 61C in the ZC axis direction.
  • the elastic portion 62C includes an arc-shaped portion 62aC formed in an arc shape so as to partially surround the mirror portion 61C while being separated from the mirror portion 61C when viewed from the direction intersecting the mirror surface 61aC (XC axis direction).
  • the elastic portion 62C is configured as a leaf spring as a whole including the arcuate portion 62aC.
  • the arc-shaped portion 62aC is disposed on the opposite side of the main surface BsC of the base BC from the center line CLC passing through the center of the mirror portion 61C in the ZC axis direction.
  • the center line CLC is a virtual straight line extending along the direction (XC axis direction) along the mirror surface 61aC and the main surface BsC.
  • the elastic portion 62C includes one end 62pC and the other end 62rC provided at both ends of the arc-shaped portion 62aC.
  • the one end portion 62pC and the other end portion 62rC may be continuously curved in an arc shape from the arc-shaped portion 62aC, or may be linear.
  • the one end 62pC and the other end 62rC are located on the center line CLC, for example.
  • the elastic portion 62C is configured symmetrically with respect to another center line DLC passing through the center of the mirror portion 61C in the ZC axis direction.
  • the center line DLC is a virtual line that intersects (orthogonally) the center line CLC and extends along the ZC axis direction.
  • the support portion 66C is a rod having a rectangular cross section, and is provided so as to sandwich at least a part of the mirror part 61C (a part on the main surface BsC side of the base BC) in the XC axis direction.
  • the support portion 66C is connected to each of the one end portion 62pC and the other end portion 62rC of the elastic portion 62C (formed in a continuous manner).
  • the support portion 66C extends from the one end portion 62pC and the other end portion 62rC to the base BC side from the mirror portion 61C.
  • the support portion 66C includes an inclined portion 66aC that is inclined so that the distance from each other approaches the base BC from the one end portion 62pC and the other end portion 62rC. Further, the support portion 66C includes a locking portion 65C extending from the end portion on the opposite side to the one end portion 62pC and the other end portion 62rC in the inclined portion 66aC.
  • the support portion 66C includes a protruding portion 66cC that protrudes from the inclined portion 66aC in the opposite direction between the pair of support portions 66C.
  • a corner portion 66pC is formed by the inclined portion 66aC, the locking portion 65C, and the protruding portion 66cC. Between the pair of support portions 66C, the corner portions 66pC face opposite to each other.
  • the support portion 66C can be elastically deformed so as to compress the elastic portion 62C in the XC axis direction by applying a force to the support portion 66C so as to sandwich the support portion 66C from both sides in the XC axis direction. That is, the distance between the support portions 66C along the XC axis direction is variable according to the elastic deformation of the elastic portion 62C. Further, the elastic force of the elastic portion 62C can be applied to the support portion 66C. In addition, when providing the force for deform
  • the connecting portion 67C is provided on one of the pair of support portions 66C, and connects the support portion 66C and the mirror portion 61C to each other.
  • the connecting portion 67C is connected to the inclined portion 66aC of the support portion 66C.
  • the connecting portion 67C is connected to the mirror portion 61C at a position opposite to the base BC with respect to the connecting position with the inclined portion 66aC. Accordingly, the connecting portion 67C is inclined so as to approach the base BC as it goes from one support portion 66C where the connecting portion 67C is not provided to the other support portion 66C. Further, the connecting portion 67C is provided closer to the base BC than the center of the mirror surface 61aC. Therefore, the pair of support portions 66C extend to the base BC side beyond the connection position CPC with the mirror portion 61C by the connection portion 67C, and are inserted into an opening 37aC described later.
  • the locking portion 65C is bent as a whole.
  • the locking portion 65C includes an inclined surface 65aC and an inclined surface 65bC.
  • the inclined surface 65aC and the inclined surface 65bC are surfaces opposite to the surfaces facing each other in the pair of locking portions 65C (outer surfaces).
  • the inclined surfaces 65aC are inclined so as to approach each other in the direction away from the connecting portion 67C (ZC axis negative direction) between the pair of locking portions 65C.
  • the inclined surfaces 65bC are inclined so as to be separated from each other in the ZC axis negative direction.
  • the inclination angles of the inclined surfaces 65aC and 65bC with respect to the ZC axis are the same as those of the inclined surfaces 55aC and 55bC in the movable mirror 5C.
  • an opening 42C is formed in the intermediate layer 4C.
  • the opening 42C includes the opening 37aC of the mounting region 37C when viewed from the ZC axis direction, and opens on both sides of the intermediate layer 4C in the ZC axis direction.
  • An opening 22C is formed in the support layer 2C.
  • the opening 22C includes the opening 37aC of the mounting region 37C when viewed from the ZC axis direction, and opens on both sides of the support layer 2C in the ZC axis direction.
  • a continuous space S2C is formed by the region in the opening 42C of the intermediate layer 4C and the region in the opening 22C of the support layer 2C. That is, the space S2C includes a region in the opening 42C of the intermediate layer 4C and a region in the opening 22C of the support layer 2C.
  • the inner surface of the opening 37aC is configured in the same manner as the inner surface of the opening 31bC in the mounting region 31C. Therefore, when the pair of locking portions 65C is disposed in the opening 37aC, the locking portion 65C presses the inner surface of the opening 37aC by the elastic force of the elastic portion 62C, and the reaction force from the inner surface of the opening 37aC is increased by the locking portion 65C ( The support portion 66C) is applied. Accordingly, the fixed mirror 6C is supported by the base BC by the reaction force of the elastic force applied to the support portion 66C from the inner surface of the opening 37aC in a state where the mirror surface 61aC intersects (for example, orthogonally) with the main surface BsC. In particular, in the fixed mirror 6C, as in the case of the movable mirror 5C, self-alignment using the inner surface and edge of the opening 37aC and the elastic force is performed.
  • the fixed mirror 6C as described above is also integrally formed by, for example, MEMS technology (patterning and etching) similarly to the movable mirror 5C.
  • the dimension of each part of the fixed mirror 6C is the same as the above-described dimension of each part of the movable mirror 5C, for example.
  • the thickness of the locking portion 65C is larger than the thickness (plate thickness) of the elastic portion 62C.
  • the overall thickness of the support portion 66C is larger than the thickness of the elastic portion 62C.
  • the thickness of the connecting portion 67C is larger than the thickness of the elastic portion 62C. That is, here, the elastic portion 62C is the thinnest (thinner) among the elastic portion 62C, the support portion 66C, and the connecting portion 67C.
  • the support portion 66C and the connecting portion 67C are not substantially deformed.
  • the support part 66C and the connection part 67C may be slightly deformed.
  • the support part 66C and the connection part 67C may be deformed in a range where the deformation amount of the support part 66C and the connection part 67C is smaller than the deformation amount of the elastic part 62C (note that the support part 66C and the connection part 67C).
  • the amount of deformation may be zero).
  • the movable mirror 5C includes an elastic portion 52C and a pair of support portions 56C whose distances can be changed according to the elastic deformation of the elastic portion 52C.
  • an opening 31bC communicating with the main surface BsC is formed in the mounting region 31C of the base BC on which the movable mirror 5C is mounted.
  • the support portion 56C by inserting the support portion 56C into the opening 31bC in a state where the elastic portion 52C is elastically deformed so that the distance between the support portions 56C is reduced, and releasing a part of the elastic deformation of the elastic portion 52C, The mutual distance between the support portions 56C increases in the opening 31bC, and the support portion 56C can be brought into contact with the inner surface of the opening 31bC.
  • the movable mirror 5C is supported by the reaction force applied to the support portion 56C from the inner surface of the opening 31bC.
  • the movable mirror 5C is mounted on the base BC by using an elastic force. Therefore, the optical element can be reliably mounted without considering the adverse effect of the adhesive, that is, regardless of the characteristics of the mounting region 31C.
  • the action and effect have been described by taking the movable mirror 5C as an example, but the same action and effect are also obtained with respect to the fixed mirror 6C (the same applies hereinafter).
  • a connecting portion 57C that connects the mirror portion 51C and the support portion 56C to each other is provided on the base BC side with respect to the center of the mirror surface 51aC. Therefore, for example, the center of gravity of the movable mirror 5C as a whole is closer to the base BC than when the connecting portion 57C is provided on the opposite side of the base BC from the center of the mirror surface 51aC. For this reason, stability improves.
  • the elastic portion 52C can be provided around the mirror portion 51C in the entire region opposite to the base BC from the center of the mirror surface 51aC. In this region, a member (for example, a connecting portion) that affects the elastic deformation of the elastic portion 52C is not necessary. For this reason, the elastically deformable portion of the elastic portion 52C can be made relatively long, and the spring constant can be easily adjusted. As a result, by suppressing an increase in the spring constant, it is possible to suppress damage to the elastic portion due to elastic deformation and realize stable mounting.
  • the elastic portion 52C is free.
  • the part which can be elastically deformed is divided by the connecting part. As a result, it is difficult to obtain the above effect.
  • the movable mirror 5C can be stably mounted regardless of the characteristics of the mounting region 31C.
  • the elastic portion 52C can be provided around the mirror portion 51C in the entire region opposite to the base BC from the center of the mirror surface 51aC. For this reason, even if it is a case where the elastic part 52C is provided so that it may adjoin to the mirror part 51C, the length of the elastic part 52C is securable enough. That is, according to this movable mirror 5C, it is possible to realize a compact movable mirror 5C while ensuring the length of the elastic portion 52C.
  • the elastic portion 52C includes an arc-shaped portion 52aC formed so as to partially surround the mirror portion 51C when viewed from the direction intersecting the mirror surface 51aC, and includes one end portion 52pC and the other end portion. 52rC is provided at the tip of the arcuate portion 52aC. Since the elastic portion 52C has the arc-shaped portion 52aC as described above, both compactness and securing of the length of the elastic portion 52C can be reliably achieved.
  • the support portion 56C includes a locking portion 55C that extends to the base BC side beyond the connection position CPC with the mirror portion 51C by the connection portion 57C and is inserted into the opening 31bC. Then, when viewed from the direction intersecting the mirror surface 51aC, the thickness of the locking portion 55C is larger than the thickness of the elastic portion 52C. For this reason, the movable mirror 5C can be more stably supported on the base BC via the locking portion 55C.
  • the thickness of the support portion 56C is larger than the thickness of the elastic portion 52C when viewed from the direction intersecting the mirror surface 51aC. For this reason, the force for elastically deforming the elastic part 52C can be stably applied to the elastic part 52C via the support part 56C.
  • the thickness of the connecting portion 57C may be larger than the thickness of the elastic portion 52C when viewed from the direction intersecting the mirror surface 51aC. In this case, the support part 56C and the mirror part 51C can be reliably connected.
  • the inner surface of the opening 31bC has a pair of inclined surfaces SLC that are inclined so that the distance from one end SLaC to the other end SLbC increases as viewed from the ZC axis direction, and one inclined surface.
  • a reference plane SRC extending along a reference line BLC connecting the other end SLbC of the SLC and the other end SLbC of the other inclined surface SLC.
  • the optical module 1C further includes a fixed mirror 6C mounted on the base BC and a beam splitter 7C.
  • the base BC has a drive region 32C connected to the mounting region 31C, and includes a movable mirror 5C and a fixed mirror 6C.
  • the beam splitter 7C is arranged so as to constitute the interference optical system 10C. For this reason, FTIR with improved sensitivity can be obtained.
  • the mounting region 31C on which the movable mirror 5C is mounted has a characteristic of being driven by being connected to the drive region 32C. Therefore, the above configuration is more effective because it is easily affected by the adverse effects of the adhesive.
  • the base BC includes a support layer 2C, a device layer 3C provided on the support layer 2C, and an intermediate layer 4C provided between the support layer 2C and the device layer 3C. ing.
  • the support layer 2C is a first silicon layer of the SOI substrate
  • the device layer 3C is a second silicon layer of the SOI substrate
  • the intermediate layer 4C is an insulating layer of the SOI substrate.
  • the mirror surface 51aC of the movable mirror 5C is located on the opposite side of the support layer 2C with respect to the device layer 3C. Thereby, the configuration of the optical module 1C can be simplified.
  • the light incident part 8C is arranged so that the measurement light is incident on the interference optical system 10C from the outside, and the light emitting part 9C emits the measurement light from the interference optical system 10C to the outside.
  • the light emitting part 9C emits the measurement light from the interference optical system 10C to the outside.
  • the space S1C is formed between the support layer 2C and the device layer 3C, and as long as it corresponds to at least the mounting region 31C and the drive region 32C, as shown in FIG. 52 and FIG. Aspects can be employed.
  • a recess 23C that opens to the device layer 3C side is formed in the support layer 2C, and the region in the opening 41C of the intermediate layer 4C and the recess 23C in the support layer 2C
  • the space S1C is configured by the regions.
  • the region in the recess 23C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 23C through a region in the opening 41C of the intermediate layer 4C. Also with this configuration, a configuration for reliably mounting the movable mirror 5C on the device layer 3C can be suitably realized.
  • the region in the opening 21C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction.
  • a part of the locking portion 55C is located in a region in the opening 21C of the support layer 2C via a region in the opening 41C of the intermediate layer 4C.
  • the region in the recess 23C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axial direction.
  • the region in the opening 41C of the intermediate layer 4C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and is separated from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a gap for separating the power portion from the support layer 2C is formed.
  • a part of the locking portion 55C is located in a region in the recess 23C of the support layer 2C via a region in the opening 41C of the intermediate layer 4C.
  • the support layer 2C and the device layer 3C may be joined to each other without the intermediate layer 4C.
  • the support layer 2C is formed of, for example, silicon, borosilicate glass, quartz glass, or ceramic
  • the device layer 3C is formed of, for example, silicon.
  • the support layer 2C and the device layer 3C are bonded to each other by, for example, normal temperature bonding by surface activation, low temperature plasma bonding, direct bonding for performing high temperature treatment, insulating resin bonding, metal bonding, bonding by glass frit, or the like.
  • the space S1C is formed between the support layer 2C and the device layer 3C, and if it corresponds to at least the mounting region 31C and the drive region 32C, FIG. 54, FIG. 55, FIG. As shown in 57, various aspects can be employed. In any configuration, it is possible to suitably realize a configuration for surely mounting the movable mirror 5C on the device layer 3C.
  • the space S1C is constituted by the region in the opening 21C of the support layer 2C.
  • the region in the opening 21C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C out of the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of the locking portion 55C is located in a region in the opening 21C of the support layer 2C.
  • the space S1C is configured by the region in the concave portion 23C of the support layer 2C.
  • the region in the recess 23C of the support layer 2C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C out of the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of the locking portion 55C is located in a region in the concave portion 23C of the support layer 2C.
  • a recess (first recess) 38C that opens to the support layer 2C side is formed in the device layer 3C, and the region in the recess 38C of the device layer 3C and the support layer 2C A space S1C is formed by the region in the opening 21C.
  • the region in the recess 38C of the device layer 3C and the region in the opening 21C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a region in the recess 38C of the device layer 3C forms a gap for separating a portion to be separated from the support layer 2C from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a part of the locking portion 55C is located in a region in the opening 21C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space is defined by the region in the recess 38C of the device layer 3C and the region in the recess (second recess) 23C of the support layer 2C.
  • S1C is configured.
  • the region in the recess 38C of the device layer 3C and the region in the recess 23C of the support layer 2C include a range in which the mounting region 31C moves when viewed from the ZC axis direction.
  • a region in the recess 38C of the device layer 3C forms a gap for separating a portion to be separated from the support layer 2C from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a part of each locking portion 55C of the movable mirror 5C is located in a region in the recess 23C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space S1C is formed by the region in the recess 38C of the device layer 3C and the region in the opening 21C of the support layer 2C.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C. A gap for separating the portion from the support layer 2C is formed.
  • the region in the opening 21C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction. A part of each locking portion 55C of the movable mirror 5C is located in a region in the opening 21C of the support layer 2C via a region in the recess 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space is defined by the region in the recess 38C of the device layer 3C and the region in the recess (second recess) 23C of the support layer 2C.
  • S1C is configured.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C. A gap for separating the portion from the support layer 2C is formed.
  • the region in the recess 23C of the support layer 2C includes a range in which each locking portion 55C of the movable mirror 5C moves when viewed from the ZC axis direction.
  • a part of the locking portion 55C is located in a region in the concave portion 23C of the support layer 2C via a region in the concave portion 38C of the device layer 3C.
  • the recess 38C is formed in the device layer 3C, and the space S1C is configured by the region in the recess 38C of the device layer 3C.
  • the region in the recess 38C of the device layer 3C includes a range in which the mounting region 31C moves when viewed from the ZC axis direction, and should be separated from the support layer 2C in the mounting region 31C and the drive region 32C.
  • a gap for separating the portion from the support layer 2C is formed.
  • a part of the locking part 55C is located in a region in the recess 38C of the device layer 3C.
  • the mirror surface 51aC of the movable mirror 5C may be located on the opposite side of the device layer 3C with respect to the support layer 2C.
  • the locking part 55C is extended so as to reach the opening 31bC.
  • the mirror surface 61aC of the fixed mirror 6C and the optical functional surface 7aC of the beam splitter 7C are also located on the opposite side of the device layer 3C with respect to the support layer 2C.
  • a spacer 39C that protrudes on the opposite side of the support layer 2C is provided integrally with the device layer 3C.
  • the spacer 39C protrudes from a portion of each locking portion 55C of the movable mirror 5C that protrudes from the device layer 3C to the side opposite to the support layer 2C, and protects the portion.
  • the opening 31bC communicates with the main surface BsC through a space defined by the spacer 39C.
  • the opening 31bC communicates with another main surface which is a surface opposite to the main surface BsC through the space S1C.
  • the fixed mirror 6C is mounted on the device layer 3C.
  • the fixed mirror 6C may be mounted on the support layer 2C or the intermediate layer 4C.
  • the beam splitter 7C is mounted on the support layer 2C.
  • the beam splitter 7C may be mounted on the device layer 3C or the intermediate layer 4C.
  • the beam splitter 7C is not limited to a cube type beam splitter, and may be a plate type beam splitter.
  • the optical module 1C may include a light emitting element that generates measurement light to be incident on the light incident portion 8C in addition to the light incident portion 8C.
  • the optical module 1C may include a light emitting element that generates measurement light incident on the interference optical system 10C, instead of the light incident portion 8C.
  • the optical module 1C may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9C in addition to the light emitting unit 9C.
  • the optical module 1C may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10C instead of the light emitting unit 9C.
  • first through electrode electrically connected to each actuator region 33C and the second through electrode electrically connected to each of the both end portions 34aC of each elastic support region 34C are the support layer 2C and the intermediate layer 4C. (If the intermediate layer 4C does not exist, only the support layer 2C is provided), and a voltage may be applied between the first through electrode and the second through electrode.
  • the actuator that moves the mounting region 31C is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like.
  • the optical module 1C is not limited to the one constituting the FTIR, and may constitute another optical system.
  • the shape of the opening 31bC when viewed from the ZC axis direction may be a triangle.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a reference surface SRC.
  • the one ends SLaC of the inclined surfaces SLC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by inscribed the locking portion 55C at the corner defined by the inclined surface SLC and the reference surface SRC.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a hexagon.
  • the inner surface of the opening 31bC includes a pair of inclined surfaces SLC and a pair of inclined surfaces SKC inclined to the opposite side of the inclined surface SLC.
  • the pair of inclined surfaces SKC are inclined so that the distance from each other increases from one end SKaC to the other end SKbC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other to form one corner.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • one locking portion 55C contacts the inner surface of the opening 31bC at two points.
  • the inclined surface SLC may be a curved surface.
  • the pair of inclined surfaces SLC are inclined and curved so that the distance increases from one end SLaC to the other end SLbC.
  • the inclined surface SLC is curved such that the inclination of the tangent to the inclined surface SLC with respect to the XC axis gradually increases from one end SLaC to the other end SLbC.
  • the inclined surface SLC is curved so as to be convex toward the inside of the opening 31bC. Even in this case, the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by inscribed in the corners defined by the inclined surface SLC and the reference surface SRC. is there.
  • both the inclined surface SLC and the inclined surface SKC are curved surfaces that are convex toward the inside of the opening 31bC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other via a connection surface extending along the XC axis direction.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • each of the two portions 31pC has an inclined surface SLC and a reference surface SRC. That is, here, the reference plane SRC is also divided into two parts. However, as viewed from the ZC axis direction, the reference surface SRC as a whole is connected to the other end SLbC of the inclined surface SLC of the one portion 31pC and the other end SLbC of the inclined surface SLC of the other portion 31pC. It extends along. In this case, one locking portion 55C is inserted into one portion 31pC of the opening 31bC.
  • the engaging portion 55C is inscribed in the corner defined by the inclined surface SLC and the reference surface SRC, so that the movable mirror 5C can be positioned in both the XC axis direction and the YC axis direction.
  • each of the two portions 31pC has an inclined surface SLC and an inclined surface SKC.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the shape of the opening 31bC when viewed from the ZC axis direction is a rhombus.
  • the inner surface of the opening 31bC may be constituted by the inclined surface SLC and the inclined surface SKC. That is, here, in addition to the inclined surface SLC and the inclined surface SKC being connected to each other, the one ends SLaC of the inclined surfaces SLC are connected to each other, and the one ends SKaC of the inclined surfaces SKC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the other end SLbC of the inclined surface SLC and the other end SKbC of the inclined surface SKC are connected to each other via a connection surface extending along the XC axis direction.
  • the one ends SLaC of the inclined surfaces SLC are connected to each other, and the one ends SKaC of the inclined surfaces SKC are connected to each other.
  • the movable mirror 5C can be positioned in both the XC-axis direction and the YC-axis direction by the engagement portion 55C being inscribed at the corner defined by the inclined surface SLC and the inclined surface SKC.
  • the shapes of the mirror portions 51C and 61C and the mirror surfaces 51aC and 61aC are not limited to a circle, and may be a rectangle or other shapes.
  • the modifications of the movable mirror 5C and the opening 31bC are not limited to those described above.
  • the movable mirror 5C and the opening 31bC may be another modified example configured by exchanging arbitrary portions of the above-described modified examples. The same applies to the fixed mirror 6C and the opening 37aC.
  • the movable mirror and the fixed mirror were illustrated as an optical element mounted in base BC.
  • the optical surface is a mirror surface.
  • the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.
  • the centers of the mirror surfaces (optical surfaces) 51aC and 61aC described above are the centers of the mirror surfaces 51aC and 61aC in the ZC axis direction (direction intersecting (orthogonal) with the main surface BsC).
  • the shape of the mirror surfaces 51aC and 61aC is not a shape that can uniquely determine the center (for example, a circle or a quadrangle)
  • the centers of the mirror surfaces 51aC and 61aC are the mirror surfaces 51aC and 61aC in the ZC axis direction. It can also be interpreted by replacing the center of gravity.
  • the center of gravity can be defined according to the areas of the mirror surfaces 51aC and 61aC.
  • the elastic part 52C is elastically deformed so that the distance of 56 C of support parts may reduce, for example.
  • the distance between the support portions 56C is increased by opening a part of the elastic deformation of the elastic portion 52C in the opening 31bC.
  • the support portion 56C is brought into contact with the inner surface of the opening 31bC to perform self-alignment.
  • the elastic portion 52C may be elastically deformed so as to increase the interval between the support portions 56C. In that case, when a part of the elastic deformation of the elastic portion 52C is released in a state where the locking portion 55C is inserted into the opening 31bC, the locking portions 55C are displaced so as to approach each other.
  • An optical module comprising an optical element and a base on which the optical element is mounted,
  • the optical element includes an optical part having an optical surface, an elastic part including one end part and the other end part provided around the optical part, and the optical part from each of the one end part and the other end part.
  • a pair of support parts extending to the base side, and a connecting part for connecting one of the support parts and the optical part to each other;
  • the base has a main surface and a mounting region provided with an opening communicating with the main surface;
  • the support portion is provided with an elastic force according to the elastic deformation of the elastic portion and the distance between the support portion is variable, and is inserted into the opening in a state where the elastic force is applied.
  • the optical element is supported by the mounting region by a reaction force of the elastic force applied from the inner surface of the opening to the support portion in a state where the optical surface intersects the main surface,
  • the connecting portion is provided closer to the base than the center of the optical surface.
  • the elastic portion includes an arc-shaped portion formed so as to partially surround the optical portion when viewed from a direction intersecting the optical surface, The one end and the other end are provided at the tip of the arcuate portion, The optical module according to appendix 22.
  • the support part includes a locking part that extends to the base side beyond the connection position with the optical part by the connection part and is inserted into the opening. When viewed from the direction intersecting the optical surface, the thickness of the locking portion is larger than the thickness of the elastic portion, The optical module according to appendix 22 or 23.
  • [Appendix 28] A fixed mirror and a beam splitter mounted on the base;
  • the optical element is a movable mirror including the optical surface which is a mirror surface;
  • the base has a drive region connected to the mounting region;
  • the movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system, 28.
  • the optical module according to any one of appendices 22 to 27.
  • the base has a support layer, a device layer provided on the support layer, and an intermediate layer provided between the support layer and the device layer,
  • the support layer is a first silicon layer of an SOI substrate;
  • the device layer is a second silicon layer of the SOI substrate;
  • the intermediate layer is an insulating layer of the SOI substrate. 29.
  • Appendix 30 A light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside; A light emitting portion arranged to emit the measurement light to the outside from the interference optical system; Comprising 30.
  • optical module according to the first embodiment, the optical module according to the second embodiment, and the optical module according to the third embodiment described above are configured to add and / or replace each arbitrary element. Can be changed.
  • connecting part (first connecting part), 54A, 64A ... leg part, 55A, 65A ... locking part, 55aA, 55bA, 65aA, 65bA ... inclined surface, 56A , 66A ... support part, 57A, 67A ... connecting part (second connecting part), SLA ... inclined surface, SLaA ... one end, SLbA ... other end, SRA ... reference plane, BLA ... reference line, CAA ... ring.
  • 1B optical module
  • 2B support layer, 3B ... device layer, 4B ... intermediate layer, 5B ... movable mirror, 7B ... beam splitter, 8B ... light incident part, 9B ... light emitting part, 10B ...
  • interference optical system 31B ... Mounting area, 31bB ... Opening, 51B ... Mirror part, 51aB ... Mirror surface, 52B ... Elastic part, 54B ... Supporting part, 55B ... Locking part, 56B ... Handle, 56B ... Handle, 56aB ... Displacement part, BB ... Base, 1C ... Optical module, 2C ... Support layer, 3C ... Device layer, 4C ... Intermediate layer, 5C ... Movable mirror (optical element), 6C ... Fixed mirror (optical element), 7C ... Beam splitter, 8C ...
  • Light incident part , 9C Light emitting unit, 10C: Interference optical system, 31C, 37C: Mounting area, 31bC, 37aC: Opening, 32C: Drive area, 51C, 61C: Mirror part (optical part), 5 aC, 61aC ... mirror surface (optical surface), 52C, 62C ... elastic part, 52aC, 62aC ... arc-shaped part, 52pC, 62pC ... one end part, 52rC, 62rC ... other end part, 55C, 65C ... locking part, 56C , 66C ... support part, 57C, 67C ... connecting part, SLC ... inclined surface, SLaC ... one end, SLbC ... other end, SRC ... reference plane, BLC ... reference line.

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  • Life Sciences & Earth Sciences (AREA)
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Abstract

L'invention concerne un module de lumière qui est équipé d'un élément optique et d'une base sur laquelle est monté l'élément optique. L'élément optique comprend : une pièce optique ayant une surface optique ; une pièce élastique qui est disposée autour de la périphérie de la pièce optique de façon à former une région annulaire ; et une paire de pièces de support qui sont disposées de façon à prendre en sandwich la pièce optique dans une première direction le long de la surface optique et pour lesquelles la distance les séparant peut changer lorsqu'une force élastique est appliquée à ces dernières en réponse à une déformation élastique de la pièce élastique. La base a une surface principale et une région de montage dans laquelle est disposée une ouverture qui communique avec la surface principale. Les pièces de support sont insérées dans l'ouverture dans un état dans lequel la force élastique de la pièce élastique agit sur les pièces de support. L'élément optique est porté dans la région de montage par une force de réaction contre la force élastique agissant sur les pièces de support à partir d'un plan interne de l'ouverture dans un état dans lequel la surface optique coupe la surface principale.
PCT/JP2018/009973 2017-03-14 2018-03-14 Module de lumière WO2018168927A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE112018001385.5T DE112018001385T5 (de) 2017-03-14 2018-03-14 Lichtmodul
CN201880017324.2A CN110392858B (zh) 2017-03-14 2018-03-14 光模块
US16/492,672 US11561388B2 (en) 2017-03-14 2018-03-14 Light module

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2017048561 2017-03-14
JP2017-048561 2017-03-14
JP2017-048559 2017-03-14
JP2017048559A JP6782651B2 (ja) 2017-03-14 2017-03-14 光モジュール
JP2017-051484 2017-03-16
JP2017051484A JP6778134B2 (ja) 2017-03-14 2017-03-16 光モジュール及びその実装方法
JP2017074494A JP6776169B2 (ja) 2017-03-14 2017-04-04 光モジュール
JP2017-074494 2017-04-04

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WO2018168927A1 true WO2018168927A1 (fr) 2018-09-20

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973160A (en) * 1989-04-06 1990-11-27 Yoshihiro Takiguchi SHG autocorrelator
US20010053261A1 (en) * 1999-06-07 2001-12-20 At&T Corp. Angular-precision enhancement in free-space micromachined optical switches
US20030049879A1 (en) * 2001-07-25 2003-03-13 Chuang-Chia Lin Method of making a mems element having perpendicular portion formed from substrate
JP2003159698A (ja) * 2001-09-17 2003-06-03 Nikon Corp マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973160A (en) * 1989-04-06 1990-11-27 Yoshihiro Takiguchi SHG autocorrelator
US20010053261A1 (en) * 1999-06-07 2001-12-20 At&T Corp. Angular-precision enhancement in free-space micromachined optical switches
US20030049879A1 (en) * 2001-07-25 2003-03-13 Chuang-Chia Lin Method of making a mems element having perpendicular portion formed from substrate
JP2003159698A (ja) * 2001-09-17 2003-06-03 Nikon Corp マイクロアクチュエータ、並びに、これを用いたマイクロアクチュエータ装置、光スイッチ及び光スイッチアレー

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