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WO2018179911A1 - Capteur de force - Google Patents

Capteur de force Download PDF

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Publication number
WO2018179911A1
WO2018179911A1 PCT/JP2018/004682 JP2018004682W WO2018179911A1 WO 2018179911 A1 WO2018179911 A1 WO 2018179911A1 JP 2018004682 W JP2018004682 W JP 2018004682W WO 2018179911 A1 WO2018179911 A1 WO 2018179911A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
sensitive
force sensor
sensitive members
operation member
Prior art date
Application number
PCT/JP2018/004682
Other languages
English (en)
Japanese (ja)
Inventor
佐藤　邦生
高井　大輔
和人 大下
元 志方
俊季 中村
Original Assignee
アルプス電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルプス電気株式会社 filed Critical アルプス電気株式会社
Publication of WO2018179911A1 publication Critical patent/WO2018179911A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Definitions

  • the present invention relates to a force sensor capable of detecting a load applied by an operation on an operation member.
  • the load detection device described in Patent Document 1 is disposed on the upper surface side of the load sensor, a load sensor having a protruding pressure receiving portion, a case for storing the load sensor with the pressure receiving portion facing the upper surface side, and a load. And an elastic body that receives and presses the load sensor in the height direction. Thereby, it is said that it is possible to provide a load detection device that can realize good handling properties and miniaturization and has good sensor sensitivity.
  • an object of the present invention is to provide a force sensor that can detect the direction, magnitude, range, distribution, and the like of an applied load.
  • a force sensor is fixed on a base material and the base material at predetermined intervals, and outputs a predetermined output according to an applied load.
  • a plurality of pressure-sensitive members to be performed and an operation member having a contact area in contact with the plurality of pressure-sensitive members are provided, and a load is applied to the plurality of pressure-sensitive members according to an operation on the operation member.
  • the state of the load applied to the operation member can be detected.
  • the force sensor according to the embodiment of the present invention may include a calculation unit that detects a state of a load applied to the operation member based on output information from a plurality of pressure-sensitive members.
  • each of the plurality of pressure-sensitive members may include a plurality of strain detection elements.
  • the plurality of strain detection elements may be arranged symmetrically with respect to the plane center of the pressure-sensitive member.
  • each pressure-sensitive member is arranged so as to be symmetric with respect to the plane center of the base material, and each pressure-sensitive member is symmetric with respect to the plane center.
  • Four strain sensing elements may be provided.
  • the operation member may be attached to the base material so as to cover the plurality of pressure sensitive members.
  • the load applied by the operation on the operation member can be detected by a plurality of pressure-sensitive members, the state of the load applied in a complicated manner can be detected.
  • the operation member may have elasticity.
  • a force sensor that can detect the state of the direction, magnitude, range, distribution, etc. of the load applied to the operation member.
  • FIG. 1 is a side view showing the configuration of the force sensor 10 according to the present embodiment
  • FIG. 2 is a plan view showing the configuration of the force sensor 10
  • FIG. 3 is a functional block diagram of the force sensor 10.
  • 4A and 4B are diagrams showing application examples of the force sensor 10.
  • the operation member 12 is virtually shown by a broken line in FIG. 1 and omitted in FIG.
  • XYZ coordinates are shown as reference coordinates.
  • the Z direction is the upward direction
  • the XY plane is a plane orthogonal to the Z direction.
  • the state viewed along the Z direction may be referred to as a plan view.
  • the force sensor 10 As shown in FIG. 1 or 2, the force sensor 10 according to the present embodiment includes a base material 11, four pressure-sensitive members 20, 30, 40, 50 arranged on the base material 11, and these The operation member 12 is mounted on the base material 11 so as to cover the pressure sensitive member.
  • the pressure sensitive member In the present embodiment, four examples of the pressure sensitive member are shown, but the number of pressure sensitive members is two, three. The number and arrangement may be arbitrarily set according to the specifications of the force sensor.
  • the base material 11 is, for example, a circuit board, and an integrated circuit constituting the calculation unit 61 and the control unit 62 shown in FIG. 3 and wirings connected to the integrated circuit are arranged.
  • the control unit 62 has an interface unit.
  • the control unit 62 gives the calculation result of the calculation unit 61 to the external display device 63 for display.
  • the operation member 12 is made of an elastic material, for example, synthetic rubber such as urethane rubber or silicone rubber, and the upper portions of the operation bodies 25, 35, 45, 55 of the four pressure-sensitive members 20, 30, 40, 50. Are arranged so as to cover from above the Z direction, and preferably the end portion 12a in the XY plane direction is fixed to the base material 11 by adhesion.
  • the operation member 12 has an inner surface 12b, the operation body 25 of the first pressure-sensitive member 20, the operation body 35 of the second pressure-sensitive member 30, the operation body 45 of the third pressure-sensitive member 40, and the fourth sensitivity.
  • a contact region that contacts the operating body 55 of the pressure member 50 is configured.
  • the operation member 12 constitutes an epidermis F1 of a finger F of a human body model as shown in FIG. 4A, for example.
  • the base material 11 and the four pressure-sensitive members 20, 30, 40, 50 fixed on the base material 11 are arranged inside the finger F.
  • an operation member 112 having the configuration shown in FIG. 4B can be used.
  • the operation member 112 includes an operation main body 112a and an arm portion 112b extending downward from the operation main body 112a, and both the operation main body 112a and the arm portion 112b are made of a hard material, for example, metal.
  • two pressure-sensitive members 120 and 130 are disposed on the substrate 111, and between the operating body 125 of the first pressure-sensitive member 120 and the operating body 135 of the second pressure-sensitive member 130.
  • the arm portion 112b of the operation member 112 is disposed.
  • the base 111 and the two pressure-sensitive members 120 and 130 have the same configuration as the base 11 and the four pressure-sensitive members 20 to 50 shown in FIG. 2, respectively.
  • the side surface 112 c of the arm portion 112 b constitutes a contact area in contact with the operation bodies 125 and 135 of the two pressure sensitive members 120 and 130.
  • the arm portion 112b is inclined with respect to the Z direction together with the operation main body 112a, and accordingly, the operation bodies 125 and 135 are inclined.
  • each of the four pressure-sensitive members 20, 30, 40, 50 has support bases 22, 32, 42, 52 each having a square outer shape in plan view, and the outer edges thereof are bonded to each other by bonding. It is fixed to the material 11.
  • the four pressure-sensitive members 20, 30, 40, 50 are arranged symmetrically with respect to the center 11 c of the plane of the base material 11 at regular intervals. More specifically, the first pressure-sensitive member 20 and the second pressure-sensitive member 30, the second pressure-sensitive member 30 and the third pressure-sensitive member 40, the third pressure-sensitive member 40 and the fourth pressure-sensitive member.
  • the pressure member 50 and the fourth pressure-sensitive member 50 and the first pressure-sensitive member 20 are arranged on the base material 11 so as to be separated from each other with a distance L in both the X direction and the Y direction. Has been. Further, in the Y direction, the first pressure sensitive member 20 and the third pressure sensitive member 40 are disposed so as to have a distance of 2L, and in the X direction, the second pressure sensitive member 30 and the fourth pressure sensitive member. 50 is also arranged at a distance of 2L.
  • the distance L can be arbitrarily set according to the application and specifications.
  • FIG. 5 is a perspective view showing a configuration of the first pressure-sensitive member 20
  • FIG. 6 is a circuit diagram of a strain detection element included in the first pressure-sensitive member 20
  • FIG. 7 is a plan view showing the configuration of the four pressure-sensitive members 20, 30, 40, 50.
  • the first pressure-sensitive member 20 has a support base 22 made of synthetic resin.
  • the support base 22 is integrally formed with a plus X deforming portion 23a and a minus X deforming portion 23b extending in the X direction and a plus Y deforming portion 24a and a minus Y deforming portion 24b extending in the Y direction.
  • An operation body 25 that protrudes concentrically upward is integrally provided at the center of the plane of the support base 22.
  • the operating body 25 is disposed at the center of the plus X deforming portion 23a and the minus X deforming portion 23b and the center of the plus Y deforming portion 24a and the minus Y deforming portion 24b.
  • the operating direction and the operating force correspond to the operating direction.
  • the plus X deforming portion 23a, the minus X deforming portion 23b, the plus Y deforming portion 24a, and the minus Y deforming portion 24b are bent.
  • a plus X strain sensor 26a is attached to the upper surface of the plus X deformation portion 23a, and a minus X strain sensor 26b is attached to the upper surface of the minus X deformation portion 23b.
  • a plus Y strain sensor 27a is attached to the upper surface of the plus Y deformation portion 24a, and a minus Y strain sensor 27b is attached to the upper surface of the minus Y deformation portion 24b.
  • These strain sensors 26 a, 26 b, 27 a, 27 b are arranged symmetrically with respect to the operating body 25 located at the plane center of the support base 22.
  • strain sensors 26a, 26b, 27a, and 27b may be attached to the lower surfaces of the deformable portions 23a, 23b, 24a, and 24b, respectively.
  • the strain sensors 26a, 26b, 27a, and 27b are strain detection elements that detect strain and deflection generated in the deformed portions 23a, 23b, 24a, and 24b, respectively, and are formed as resistance films. As shown in FIG. 6, the strain sensors 26a, 26b, 27a, and 27b are connected to each other to form a bridge circuit.
  • the plus X deforming portion 23a and the minus X deforming are made according to the pressing direction and the pressing force. Deflection occurs in the portion 23b, the plus Y deformation portion 24a, and the minus Y deformation portion 24b, and the resistance values of the respective strain sensors 26a, 26b, 27a, and 27b change. Further, even when the operating body 25 is pressed downward, the deformation portions 23a, 23b, 24a, and 24b are deflected according to the pressing force, and the distortion sensors 26a, 26b, 27a, and 27b are deformed. The resistance value changes. In accordance with such a change in resistance value, an X operation output and a Y operation output are obtained from the bridge circuit shown in FIG.
  • the X operation output and the Y operation output obtained in response to changes in the resistance values of the strain sensors 26 a, 26 b, 27 a, 27 b of the first pressure-sensitive member 20 are given to the calculation unit 61.
  • an X operation output and a Y operation output corresponding to a change in the resistance value of the strain sensor in each of the pressure sensitive members 30, 40, 50 are also given to the calculation unit 61.
  • the calculation unit 61 detects the state of the load applied to the operation member 12 based on output information given from the four pressure sensitive members 20, 30, 40, 50.
  • the support base 32 of the second pressure-sensitive member 30 has a plus X strain sensor 26a, a minus X strain sensor 26b, and a plus Y strain sensor 27a in the first pressure sensitive member 20.
  • a plus X distortion sensor 36a, a minus X distortion sensor 36b, a plus Y distortion sensor 37a, and a minus Y distortion sensor 37b are attached.
  • a plus X strain sensor 46a, a minus X strain sensor 46b, a plus Y strain sensor 47a, and a minus Y strain sensor 47b are attached to the support base 42 of the third pressure-sensitive member 40.
  • a plus X strain sensor 56a, a minus X strain sensor 56b, a plus Y strain sensor 57a, and a minus Y strain sensor 57b are attached to the support base 52 of the pressure sensitive member 50.
  • the force sensor 10 having the above-described configuration can detect the situation such as the direction, size, range, and distribution of the load applied by an external force as shown in FIGS. 8A to 8E, for example.
  • 8A to 8E are side views corresponding to FIG. 1, showing the direction of the external force applied to the force sensor 10, and the illustration of the operation member 12 is omitted.
  • FIG. 8A to FIG. 8E show some examples, and it is possible to detect other loads, for example, the situation of the load due to the combined force of the external forces shown in FIG. 8A to FIG. 8E. 8A to 8E, it is assumed that the force sensor 10 is mounted so that the Z direction is along the vertical direction.
  • the mounting direction of the force sensor 10 is not limited to this. It is not limited.
  • a downward force D1 acts on all of the four pressure-sensitive members 20, 30, 40, and 50, and each has a distortion.
  • a change occurs in the resistance value in the sensor.
  • a force D2 along the X direction acts as a horizontal force.
  • changes in resistance values of the plus X strain sensors and minus X strain sensors of the four pressure-sensitive members 20, 30, 40, and 50 are superimposed.
  • the calculation unit 61 can detect the situation such as the direction, magnitude, range, and distribution of the load applied to the operation member 12.
  • FIG. 8B two forces D3 and D4 along the positive direction and the negative direction in the X direction are shown as forces from both the left and right directions.
  • an operation of pinching the operation member 12 from the left-right direction is assumed.
  • the resistance values of all of the four pressure-sensitive members 20, 30, 40, and 50 plus and minus X strain sensors change. Based on the change in resistance value generated in each strain sensor, the calculation unit 61 can detect the state of the direction, magnitude, range, distribution, etc. of the load applied to the operation member 12.
  • FIG. 8C two forces D5 and D6 along the negative direction and the positive direction in the X direction are shown as forces along the left and right directions.
  • an operation of expanding the operation member 12 in the left-right direction is assumed.
  • the resistance values of all of the four pressure-sensitive members 20, 30, 40, and 50 plus and minus X strain sensors change. Based on the change in resistance value generated in each strain sensor, the calculation unit 61 can detect the state of the direction, magnitude, range, distribution, etc. of the load applied to the operation member 12.
  • FIG. 8D shows a force D7 that rotates in a plane parallel to the XY plane.
  • an operation of twisting the operation member 12 about the vertical axis is assumed.
  • an operation is assumed in which a rotational force is applied to the operation member 12 so that a pressing force is applied to the pressure-sensitive members 20, 30, 40, and 50 in order.
  • the resistance values change in order in all the strain sensors of the four pressure-sensitive members 20, 30, 40, and 50.
  • the calculation unit 61 can detect the situation such as the direction, magnitude, range, and distribution of the load applied to the operation member 12.
  • FIG. 8E shows forces D8, D9, and D10 in different directions.
  • an operation of pushing the operation member 12 while twisting, an operation of giving different movements by a plurality of fingers, and the like are assumed.
  • the resistance value is changed in all the strain sensors of the four pressure-sensitive members 20, 30, 40, and 50.
  • the calculation unit 61 can detect the situation such as the direction, magnitude, range, and distribution of the load applied to the operation member 12.
  • each pressure-sensitive member 20, 30, 40, 50 are arranged so as to be symmetric with respect to the plane center 11c of the base material 11, and each of the pressure-sensitive members has four strains so as to be symmetric with respect to the plane center.
  • a sensing element is provided.
  • the operation member 12 Since the operation member 12 is mounted on the base material 11 so as to cover the four pressure-sensitive members 20, 30, 40, 50, the load applied by the operation on the operation member 12 can be detected by the four pressure-sensitive members. Therefore, it is possible to detect the condition of the load applied in a complicated manner.
  • the operation member 12 has elasticity, so that it is possible to accurately detect the state of the applied load while giving a realistic feel to the operator.
  • each pressure-sensitive member has a pair of strain sensors arranged in the X direction and the Y direction, but a pair of strain sensors is disposed only in one direction, and the strain sensor in the other direction. May be omitted.
  • a pair of strain sensors may be arranged on each pressure-sensitive member so as to surround the planar center 11 c of the base material 11.
  • a pair of strain sensors may be arranged on each pressure-sensitive member along the direction toward the planar center 11 c of the base material 11.
  • FIG. 11 is a circuit diagram of a strain detection element provided in the first pressure-sensitive member in the second modification of the embodiment.
  • the X operation output and the Y operation output are obtained from the bridge circuit shown in FIG. 6, but in addition to this, a Z operation output can also be obtained, whereby a load along the Z direction can be obtained. It is possible to detect a more detailed situation including
  • a changeover switch SW for switching to one of two states S1 and S2 is provided between the combined resistor 29 and the Vcc power supply.
  • the changeover switch SW is in the state S1
  • the Vcc power supply and the combined resistor 29 are directly connected.
  • the changeover switch SW is in the state S2 by switching, the Vcc power supply and the combined resistor 29 are connected via the fixed resistor 28.
  • the changeover switch SW and the fixed resistor 28 are provided on the substrate 11, and a Z operation output is obtained from between the fixed resistor 28 and the combined resistor 29.
  • the changeover switch SW is controlled by the control unit 62, and the two states S1 and S2 are switched at regular intervals. Or you may switch by operation of an operator.
  • the four strain sensors 26a, 26b, 27a, and 27b extend (or contract) in the same manner, so that the combined resistance 29 is large. Become. Therefore, in the state S2, a change occurs in the Z operation output taken out between the fixed resistor 28 and the combined resistor 29. Based on this output information, the state in the Z direction applied to the operation member 12 is calculated in the calculation unit 61. Detected. On the other hand, the X operation output and the Y operation output are obtained during the period of the state S1. By sequentially switching between the two states S1 and S2 and obtaining the Z operation output, the X operation output, and the Y operation output, it is possible to capture the state of the load applied to the operation member 12 in three dimensions.
  • the operation unit 61 monitors the X operation output and the Y output, and the state S2 is set. Further, the Z operation output is monitored by the calculation unit 61.
  • it may be used while being fixed in the state S1, or may be used while being fixed in the state S2.
  • the force sensor according to the embodiment of the present invention is useful in that it can detect the situation such as the direction, magnitude, range, distribution, and the like of the load applied to the operation member.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Switches With Compound Operations (AREA)

Abstract

L'invention aborde le problème de réalisation d'un capteur de force qui peut détecter des conditions de type direction, amplitude, portée et distribution d'une charge qui a été appliquée. La solution selon la présente invention comporte : un matériau de base; une pluralité d'organes sensibles à la pression qui sont fixés de manière à être séparés les uns des autres d'un intervalle préétabli sur le matériau de base et qui produisent une sortie préétablie en fonction d'une charge appliquée; et un organe d'actionnement qui a une zone de contact en contact avec la pluralité d'organes sensibles à la pression, une charge étant appliquée à la pluralité d'organes sensibles à la pression en fonction d'un actionnement sur l'organe d'actionnement. De plus, l'invention comporte une unité de calcul qui détecte des conditions de la charge appliquée à l'organe d'actionnement sur la base d'information de sortie provenant de la pluralité d'organes sensibles à la pression.
PCT/JP2018/004682 2017-03-25 2018-02-09 Capteur de force WO2018179911A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-060241 2017-03-25
JP2017060241A JP2020091097A (ja) 2017-03-25 2017-03-25 力覚センサ

Publications (1)

Publication Number Publication Date
WO2018179911A1 true WO2018179911A1 (fr) 2018-10-04

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PCT/JP2018/004682 WO2018179911A1 (fr) 2017-03-25 2018-02-09 Capteur de force

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WO (1) WO2018179911A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020110181A1 (fr) * 2018-11-26 2020-06-04 国立大学法人東京大学 Capteur tactile multi-axe
JP2020109366A (ja) * 2019-01-04 2020-07-16 カシオ計算機株式会社 歪み測定装置、歪み測定方法及びプログラム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7592957B2 (ja) 2020-12-24 2024-12-03 ミネベアミツミ株式会社 センサチップ、力覚センサ装置

Citations (5)

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Publication number Priority date Publication date Assignee Title
JP2004245717A (ja) * 2003-02-14 2004-09-02 Toshiba Electronic Engineering Corp 触圧センサ、把持ロボット
JP2005214850A (ja) * 2004-01-30 2005-08-11 Doshisha 荷重測定方法、および荷重センサ付き靴
US20060059997A1 (en) * 2004-09-02 2006-03-23 Jong-Ho Kim Input/output wires for tactile sensor using tri-axial force sensors
JP2006275979A (ja) * 2005-03-30 2006-10-12 National Institute Of Information & Communication Technology センサ素子、センサ装置、対象物移動制御装置、対象物判別装置
JP2010127921A (ja) * 2008-12-01 2010-06-10 Kochi Univ Of Technology 移動型床反力計測装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245717A (ja) * 2003-02-14 2004-09-02 Toshiba Electronic Engineering Corp 触圧センサ、把持ロボット
JP2005214850A (ja) * 2004-01-30 2005-08-11 Doshisha 荷重測定方法、および荷重センサ付き靴
US20060059997A1 (en) * 2004-09-02 2006-03-23 Jong-Ho Kim Input/output wires for tactile sensor using tri-axial force sensors
JP2006275979A (ja) * 2005-03-30 2006-10-12 National Institute Of Information & Communication Technology センサ素子、センサ装置、対象物移動制御装置、対象物判別装置
JP2010127921A (ja) * 2008-12-01 2010-06-10 Kochi Univ Of Technology 移動型床反力計測装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020110181A1 (fr) * 2018-11-26 2020-06-04 国立大学法人東京大学 Capteur tactile multi-axe
JPWO2020110181A1 (ja) * 2018-11-26 2021-09-27 国立大学法人 東京大学 多軸触覚センサ
JP2022191485A (ja) * 2018-11-26 2022-12-27 国立大学法人 東京大学 多軸触覚センサ
US11761837B2 (en) 2018-11-26 2023-09-19 The University Of Tokyo Multi-axial tactile sensor
JP7396731B2 (ja) 2018-11-26 2023-12-12 国立大学法人 東京大学 多軸触覚センサ
JP2020109366A (ja) * 2019-01-04 2020-07-16 カシオ計算機株式会社 歪み測定装置、歪み測定方法及びプログラム
JP7200679B2 (ja) 2019-01-04 2023-01-10 カシオ計算機株式会社 歪み測位装置、歪み測定方法

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